Yaskawa XU-ACP130-B11晶圆预对准器 PDF资料
1.产 品 资 料 介 绍:
Yaskawa XU-ACP130-B11晶圆预对准器是安川电机为半导体制造工艺设计的晶圆预对准专用设备,主要用于传输机器人的晶圆预对准环节,其主要特点可归纳为以下11条:
该型号为安川晶圆预对准器。
适配半导体晶圆传输机器人系统。
配套使用场景中常见于AMAT等半导体设备。
可实现晶圆预对准及定位功能。
可用于300mm晶圆的预对准处理。
配合安川相关控制器协同工作。
采用驱动装置与输出轴转动设计。
配备传感器单元用于感测晶圆位置。
支持接合装置控制平移机构与传感器的相对位置变化。
用于晶圆的缺口或平面定位检测。
该设备常见于二手半导体设备市场流通。
综上,Yaskawa XU-ACP130-B11晶圆预对准器是半导体自动化生产线中实现晶圆高精度预对准的关键组件,通过驱动与传感协同工作,为后续工艺提供准确的晶圆位置基准。
Yaskawa XU-ACP130-B11晶圆预对准器 英文介绍
Yaskawa XU-ACP130-B11 wafer pre alignment device is a specialized equipment designed by Yaskawa Electric for semiconductor manufacturing processes. It is mainly used in the wafer pre alignment process of transfer robots. Its main features can be summarized into the following 11:
This model is the Yaskawa wafer pre aligner.
Adapt semiconductor wafer transfer robot system.
Commonly seen in semiconductor equipment such as AMAT in supporting usage scenarios.
It can achieve wafer pre alignment and positioning functions.
Can be used for pre alignment processing of 300mm wafers.
Collaborate with Yaskawa related controllers to work together.
Adopting a drive device and output shaft rotation design.
Equipped with sensor units for sensing wafer position.
Support the joint device to control the relative position change between the translation mechanism and the sensor.
Used for gap or plane positioning detection of wafers.
This device is commonly circulated in the second-hand semiconductor equipment market.
In summary, the Yaskawa XU-ACP130-B11 wafer pre alignment device is a key component for achieving high-precision pre alignment of wafers in semiconductor automated production lines. Through the collaborative work of driving and sensing, it provides accurate wafer position benchmarks for subsequent processes.
e end, providing hardware support for the stable operation of the equipment motion system.
Yaskawa XU-ACP130-B11晶圆预对准器 产品展示

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| AMAT 0100-09010 | AMAT 0190-09437 | AMAT 0190-20033 |
| AMAT 0090-02830 | AMAT 0190-09445 | AMAT 0190-20040 |
| AMAT 0100-03499 | AMAT 0190-09459 | AMAT 0190-20050 |
| AMAT 0100-03068 | AMAT 0190-09466 | AMAT 0190-20063 |
| AMAT 0100-03920 | AMAT 0190-09468 | AMAT 0190-20081 |
| AMAT 0100-00793 | AMAT 0190-09469 | AMAT 0190-20085 |
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