3D80-000006-V1气动狭缝阀 PDF资料
1.产 品 资 料 介 绍：
3D80-000006-V1 气动狭缝阀，以下为主要特点。
属于东京电子（TEL）半导体设备专用气动阀门组件。
用于半导体刻蚀、沉积等工艺腔室的真空隔离与晶圆传输控制。
采用气动驱动方式，通过洁净干燥空气（CDA）控制闸门开闭。
闸门在打开位置与关闭位置之间转换，实现腔室的开启与密封。
配备气动致动器，通过移动构件将气动力传递至闸门。
部分同类狭缝阀设备采用伺服控制系统，实现位置闭环控制。
部分高级型号配备连续位置传感器，可实时监控闸门位置。
通过控制运动曲线，可减缓闸门接近行程末端的速度，减少震动和颗粒产生。
采用金属密封或O型密封圈结构，确保真空密封性。
阀体材质通常为不锈钢或铝合金，耐腐蚀性强。
响应速度较快，满足半导体工艺对阀门快速动作的要求。
安装方式为法兰连接，适配标准真空腔体接口。
适用于200mm及300mm晶圆传输系统。
常见于TEL刻蚀设备（如TEL SCCM系列）及其他真空工艺设备。
维护操作包括定期清洁密封面和检查气动管路。
结尾
综上，3D80-000006-V1 在驱动方式、密封性能和控制精度等方面配置明确，是一款适用于TEL半导体设备真空系统的气动狭缝阀组件。
3D80-000006-V1气动狭缝阀 英文介绍
3D80-00006-V1 pneumatic slit valve, the following are the main features.
Belongs to Tokyo Electronics (TEL) semiconductor equipment dedicated pneumatic valve components.
Used for vacuum isolation and wafer transfer control in semiconductor etching, deposition and other process chambers.
Using pneumatic drive method, the gate opening and closing are controlled by clean dry air (CDA).
The gate switches between open and closed positions to achieve the opening and sealing of the chamber.
Equipped with pneumatic actuators, the pneumatic force is transmitted to the gate through moving components.
Some similar slit valve devices adopt servo control systems to achieve closed-loop position control.
Some advanced models are equipped with continuous position sensors that can monitor the gate position in real time.
By controlling the motion curve, the speed of the gate approaching the end of its travel can be slowed down, reducing vibration and particle generation.
Adopting metal sealing or O-ring structure to ensure vacuum sealing performance.
The valve body material is usually stainless steel or aluminum alloy, with strong corrosion resistance.
Fast response speed, meeting the requirements of semiconductor technology for fast valve action.
The installation method is flange connection, compatible with standard vacuum chamber interfaces.
Suitable for 200mm and 300mm wafer transfer systems.
Commonly seen in TEL etching equipment (such as TEL SCCM series) and other vacuum process equipment.
Maintenance operations include regular cleaning of sealing surfaces and inspection of pneumatic pipelines.
ending
Overall, 3D80-00006-V1 has clear configurations in terms of driving mode, sealing performance, and control accuracy, making it a pneumatic slit valve component suitable for TEL semiconductor equipment vacuum systems.
3D80-000006-V1气动狭缝阀 产品展示
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