AMAT 0015-09077节流阀驱动器 PDF资料
1.产 品 资 料 介 绍：
AMAT 0015-09077 节流阀驱动器
- 阀门开度调节响应灵敏，控流精准
- 闭环反馈控制，稳定维持腔体真空度
- 内置过流、过载、过热多重防护
- 工业通讯接口，可对接设备主控板
- 小型模块化结构，机台安装省空间
- 抗电磁干扰，适配洁净车间工况
- 长时连续启停运行，耐用不易故障
- 自带位置自检，实时反馈阀位状态
- 标准化接线端子，拆装检修简单
- 宽温工作设计，适配设备内部环境
- 扭矩输出平稳，阀门开合无卡顿
- 故障代码提示，快速定位故障点
- 金属防护外壳，防尘防腐蚀
- 适配 AMAT 多款沉积、蚀刻真空设备
- 同型号备件可直接替换，无需复杂调试结尾：AMAT 0015-09077 控流稳定、维护简便，是半导体真空设备常用驱动备件。
AMAT 0015-09077 Throttle Valve Driver
Introduction: AMAT 0015-09077 is a semiconductor vacuum chamber matching throttle valve driving unit, which accurately adjusts the vacuum flow rate of the pipeline.
The valve opening adjustment response is sensitive and the flow control is precise
Closed loop feedback control, stable maintenance of chamber vacuum degree
Built in multiple protections against overcurrent, overload, and overheating
Industrial communication interface, capable of docking with equipment main control board
Small modular structure, space saving for machine installation
Anti electromagnetic interference, suitable for clean workshop working conditions
Long term continuous start stop operation, durable and not prone to malfunctions
Equipped with position self check and real-time feedback on valve position status
Standardized wiring terminals, easy disassembly and maintenance
Wide temperature working design, adapted to the internal environment of the equipment
Smooth torque output, valve opening and closing without jamming
Fault code prompt, quickly locate the fault point
Metal protective shell, dustproof and corrosion-resistant
Compatible with multiple AMAT deposition and etching vacuum equipment
Spare parts of the same model can be directly replaced without complex debugging
Conclusion: AMAT 0015-09077 has stable current control and easy maintenance, making it a commonly used driver spare part for semiconductor vacuum equipment.
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| 0AF00 | 531X303MCPALG1 | 061-00684-0011 |
| 073-800707-00 | 531X303DCIBDG3 | 03-167697-00 |
| 073-659411-00 | 531X302DCIBDG4 | 193X740AFG02 |
| 073-652839-00 | 531X302DCIBDG3 | 03-283968-00 |
| 073-650938-00 | 531X302DCIBBG4 | 03-281423-06 |
| 073-650203-00 | 531X302DCIBBG3 | 26-169462-00 |
| 073-650043-00 | 531X302DCIBBG1 | 03-287865-00 |
| 073-451386-00 | 531X302DCIBAG4 | 02-408298-00 |
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