AMAT 0190-34645W发电机 PDF资料
1.产 品 资 料 介 绍:
AMAT 0190-34645W 射频电源 产品特点
AMAT 0190-34645W 是一款由Advanced Energy为应用材料公司制造的射频电源,用于半导体刻蚀和沉积工艺中激发等离子体。以下是该产品的15项核心特点:
品牌为AMAT(应用材料公司),由Advanced Energy制造
属于Pinnacle系列射频电源
专为半导体制造设备中的关键工艺设计
应用于刻蚀工艺,激发反应气体形成等离子体
应用于化学气相沉积工艺,控制等离子体环境
可精确调控输出功率、频率稳定性及相位等参数
具备浪涌、过电压和短路保护功能
输入电压范围宽(85-264 VAC),适应全球供电环境
输出电压可编程,提供灵活性和可扩展性
配备数字输出控制功能,支持自动自校准
内置热保护功能,延长设备使用寿命
高效率设计,节能并改善温度控制
符合多项国际安全法规标准
具备远程感应选项,满足严格公差要求
集成总线算法,实现功率需求智能平衡
综上,AMAT 0190-34645W 是一款用于半导体刻蚀和沉积工艺的高性能射频电源,具备精确的功率控制、完善的保护功能和良好的系统兼容性。
AMAT 0190-34645W发电机 英文介绍
AMAT 0190-34645W RF power supply product features
AMAT 0190-34645W is an RF power supply manufactured by Advanced Energy for Applied Materials, used to excite plasma in semiconductor etching and deposition processes. Here are the 15 core features of this product:
The brand is AMAT (Applied Materials Company), manufactured by Advanced Energy
Belonging to the Pinnacle series RF power supply
Specially designed for key processes in semiconductor manufacturing equipment
Applied to etching process, excite reactive gas to form plasma
Applied to chemical vapor deposition process, controlling plasma environment
Accurate control of output power, frequency stability, phase and other parameters
Equipped with surge, overvoltage, and short-circuit protection functions
Wide input voltage range (85-264 VAC), suitable for global power supply environment
Programmable output voltage, providing flexibility and scalability
Equipped with digital output control function, supporting automatic self calibration
Built in thermal protection function, extending device lifespan
Efficient design, energy-saving, and improved temperature control
Compliant with multiple international safety regulations and standards
Equipped with remote sensing options to meet strict tolerance requirements
Integrate bus algorithm to achieve intelligent balance of power demand
Overall, AMAT 0190-34645W is a high-performance RF power supply used for semiconductor etching and deposition processes, with precise power control, comprehensive protection functions, and good system compatibility.
AMAT 0190-34645W发电机 产品展示

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| PC833-001-N | AMAT 0100-76252 | NTAI05 |
| PC833-001-F | 6SC6108-0SG01 | 57310001-KY DSCL110A ABB |
| PC833-001-A | AMAT 0100-20416 | HESG447427R0001 70EI05A-E |
| PC832-XYZ-T | 57330001-Y DSBB110A ABB | |
| PC832-XYZ-N | AMAT 0100-91040 | NFTP01 |
| PC832-XYZ-A | AMAT 0100-00120 | HESG332194R0001 70BK06A-E |
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