TEL 388-200206-V1温度控制器 PDF资料 

1.产 品 资 料 介 绍：

TEL 388-200206-V1 是东京电子（Tokyo Electron）生产的一款半导体设备专用温度控制器。

1. 专用于半导体制造设备的温度闭环控制。

2. 支持多通道温度监测，可读取热电偶、热敏电阻等多种传感器信号。

3. 采用PID控制算法，自动调节加热或冷却输出。

4. 可实现±0.1°C或更高的温度控制精度。

5. 内置过热、开路、短路等异常报警与保护功能。

6. 出现异常时可触发报警并自动切断输出。

7. 适用于晶圆加热台、真空腔体、气体管路等场景的温度控制。

8. 模块化设计，便于在设备机台中安装与维护。

9. 支持与设备主控系统集成，实现联动控制。

10. 可对多个独立温区分别进行测量与控制。

11. 具备温度设定值与实际值的实时显示功能。

12. 采用工业级元器件，适应连续生产环境。

13. 作为TEL原厂备件，与TEL设备兼容性好。

14. 在二手市场上存在一定流通，可作为维修替换件采购。

结尾： 综上，TEL 388-200206-V1 凭借高精度闭环控制、多通道监测能力及完善的保护机制，是TEL半导体设备中保障工艺温度稳定的关键控制模块。

TEL 388-200206-V1温度控制器 英文介绍

TEL 388-200206-V1 is a temperature controller specifically designed for semiconductor equipment produced by Tokyo Electron.

Temperature closed-loop control specifically designed for semiconductor manufacturing equipment.

Supports multi-channel temperature monitoring and can read signals from various sensors such as thermocouples and thermistors.

Adopting PID control algorithm to automatically adjust heating or cooling output.

It can achieve temperature control accuracy of ± 0.1 ° C or higher.

Built in abnormal alarm and protection functions for overheating, open circuit, short circuit, etc.

When an abnormality occurs, an alarm can be triggered and the output will be automatically cut off.

Suitable for temperature control in scenarios such as wafer heating stations, vacuum chambers, gas pipelines, etc.

Modular design facilitates installation and maintenance in equipment and machinery.

Support integration with the device control system to achieve linkage control.

Multiple independent temperature zones can be measured and controlled separately.

Real time display function of temperature set value and actual value.

Adopting industrial grade components to adapt to continuous production environments.

As an original spare part of TEL, it has good compatibility with TEL equipment.

There is a certain circulation in the second-hand market, which can be purchased as repair and replacement parts.

Conclusion: In summary, TEL 388-200206-V1 is a key control module in TEL semiconductor equipment that ensures stable process temperature due to its high-precision closed-loop control, multi-channel monitoring capability, and comprehensive protection mechanism.

TEL 388-200206-V1温度控制器 产品展示   

3.其他产品

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4.英文产品

Mitsubishi A1SJ51T64 main communication module
HE693ADC409A-22 industrial module
SE3008 KJ2005X1-SQ1 12P6383X032 controller

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs  

型号：TEL 388-200206-V1温度控制器

质保：一年

成色：全新/二手

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