Adtec Plasma Tech AMVG-RCM1-SL远程控制单元 PDF资料
1.产 品 资 料 介 绍:
Adtec Plasma Tech AMVG-RCM1-SL 远程控制单元产品特点
Adtec Plasma Tech AMVG-RCM1-SL是一款自动阻抗匹配装置远程控制单元,核心特点如下:
日本Adtec Plasma Technology公司产品。
用于远程控制AMVG系列自动阻抗匹配装置。
可安装于机柜或设备面板。
作为AMVG匹配器的选配组件,替代手动操作。
支持远程监控匹配器运行状态和参数。
适配380kHz至40.68MHz频率范围。
支持通过PC端AMV软件进行可视化操作。
可远程预设匹配参数和LC网络配置。
与AMVG匹配器通过专用接口连接,即插即用。
减少现场手动调节,提升操作便利性。
结构紧凑,节省安装空间。
适用于半导体和FPD制造设备的阻抗匹配系统。
适配单相AC100-200V或DC24V供电。
支持远程快速调谐,减少工艺切换等待时间。
可配合AMVG-RCH1手持遥控器组成多级控制。
总体而言,Adtec AMVG-RCM1-SL通过远程操作和参数管理能力,有效提升了等离子体工艺设备的操作效率和集成度。
Adtec Plasma Tech AMVG-RCM1-SL远程控制单元 英文介绍
Adtec Plasma Tech AMVG-RCM1-SL Remote Control Unit Product Features
Adtec Plasma Tech AMVG-RCM1-SL is a remote control unit for automatic impedance matching devices, with the following core features:
Products from Adtec Plasma Technology in Japan.
Used for remote control of AMVG series automatic impedance matching device.
Can be installed on cabinets or equipment panels.
As an optional component of the AMVG matcher, it replaces manual operation.
Support remote monitoring of the running status and parameters of the matching device.
Suitable for frequency range of 380kHz to 40.68MHz.
Support visual operations through PC AMV software.
Remote preset matching parameters and LC network configuration are available.
Connected to the AMVG adapter through a dedicated interface, plug and play.
Reduce on-site manual adjustment and improve operational convenience.
Compact structure, saving installation space.
Impedance matching system suitable for semiconductor and FPD manufacturing equipment.
Suitable for single-phase AC100-200V or DC24V power supply.
Support remote quick tuning to reduce waiting time for process switching.
Can be combined with AMVG-RCH1 handheld remote control to form multi-level control.
Overall, Adtec AMVG-RCM1-SL has effectively improved the operational efficiency and integration of plasma process equipment through remote operation and parameter management capabilities.
Adtec Plasma Tech AMVG-RCM1-SL远程控制单元 产品展示

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