MKS 651D-15414压力控制器 PDF资料
1.产 品 资 料 介 绍：
MKS 651D-15414 是MKS Instruments推出的一款高精度压力控制器，专用于驱动MKS 253及653系列蝶阀，通过PID算法实现真空系统的精确压力调节。
中间13条特点
内置大功率驱动器，可驱动最大100mm带真空关断功能的阀门。
采用自调节快速PID控制算法，重复精度达满量程±0.1%。
双通道输入设计，支持从大气压到高真空的宽动态控制范围。
前面板可同时显示系统压力和阀门开度百分比。
兼容MKS 121、122、622、626、627等多种Baratron电容压力计。
提供5个内部可编程设定点和1个外部模拟设定点。
支持压力控制与位置控制两种模式切换。
配备RS-232串行通讯接口，支持远程控制。
具备可调软启动功能，减少腔体湍流和工艺污染。
内置两个工艺限制继电器，支持高低报警阈值设定。
前面板设有按键锁定开关，防止误操作。
标配锂电池用于断电后保存参数，可选配电池实现断电阀门保护。
工作温度15-40°C，湿度≤80%RH，适合标准工业环境。
结尾
总体而言，MKS 651D-15414 以高精度控制、宽动态范围和灵活配置，为半导体及真空镀膜等领域的精密压力调节提供了可靠高效的核心控制方案。
MKS 651D-15414压力控制器 英文介绍
MKS 651D-15414 is a high-precision pressure controller developed by MKS Instruments, specifically designed to drive MKS 253 and 653 series butterfly valves. It achieves precise pressure regulation of vacuum systems through PID algorithm.
13 characteristics in the middle
Built in high-power driver, capable of driving valves up to 100mm with vacuum shut-off function.
Adopting a self-adjusting fast PID control algorithm, the repeatability accuracy reaches ± 0.1% of the full range.
Dual channel input design, supporting a wide dynamic control range from atmospheric pressure to high vacuum.
The front panel can display both system pressure and valve opening percentage simultaneously.
Compatible with various Baratron capacitive pressure gauges such as MKS 121, 122, 622, 626, 627, etc.
Provide 5 internal programmable setpoints and 1 external simulated setpoint.
Supports switching between pressure control and position control modes.
Equipped with RS-232 serial communication interface, supporting remote control.
Equipped with adjustable soft start function, reducing chamber turbulence and process pollution.
Built in two process limiting relays, supporting high and low alarm threshold settings.
The front panel is equipped with a button lock switch to prevent accidental operation.
Standard lithium battery is used to save parameters after power failure, and optional battery can be used to achieve power-off valve protection.
Working temperature is 15-40 ° C, humidity is ≤ 80% RH, suitable for standard industrial environments.
ending
Overall, MKS 651D-15414 provides a reliable and efficient core control solution for precision pressure regulation in fields such as semiconductor and vacuum coating with high-precision control, wide dynamic range, and flexible configuration.
MKS 651D-15414压力控制器 产品展示
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