DAIHEN 2L39-000158-V3射频自动匹配器 PDF资料
1.产 品 资 料 介 绍：
DAIHEN 2L39-000158-V3 射频自动匹配器产品特点
- 自动实时匹配负载阻抗，射频传输损耗低
- 快速调谐响应，适配腔体阻抗动态变化
- 大幅降低反射功率，保护射频电源主机
- 适配标准工业射频频率，兼容主流工艺
- 内置风冷散热，长时间满载运行不超温
- 高压绝缘防护，避免射频漏电故障
- 原厂标准接口，可直接替换同规格备件
- 信号实时反馈，便于机台系统监控状态
- 紧凑模块化机身，节省设备内部安装空间
- 耐腐蚀内部元件，耐受工艺腐蚀气体环境
- 多重故障保护，过温过流自动停机预警
- 运行震动小，不干扰精密半导体制程
- 标准化通讯协议，对接 TEL 设备主控系统
- 高耐用可调电容电感，维护周期更长
- 洁净车间适配密封结构，防尘防水汽侵入结尾：DAIHEN 2L39-000158-V3 匹配精准、防护完善，是等离子半导体设备核心射频配套部件。
DAIHEN 2L39-000158-V3射频自动匹配器 英文介绍
DAIHEN 2L39-000158-V3 RF Automatic Matcher Product Features
Introduction: DAIHEN 2L39-000158-V3 is a specialized RF matching device for semiconductor etching and coating equipment, which can quickly adjust impedance and stabilize plasma processes.
Automatic real-time matching of load impedance, low RF transmission loss
Fast tuning response to adapt to dynamic changes in cavity impedance
Significantly reduce reflected power and protect the RF power supply host
Compatible with standard industrial RF frequencies and mainstream processes
Built in air-cooled heat dissipation, long-term full load operation without overheating
High voltage insulation protection to avoid RF leakage faults
Original factory standard interface, can directly replace spare parts of the same specification
Real time signal feedback for easy monitoring of machine system status
Compact modular body, saving installation space inside the device
Corrosion resistant internal components, resistant to process corrosive gas environments
Multiple fault protection, automatic shutdown warning for overheating and overcurrent
Low vibration during operation, does not interfere with precision semiconductor processes
Standardized communication protocol, integrated with TEL equipment control system
High durability adjustable capacitors and inductors, with longer maintenance cycles
The clean workshop is equipped with a sealed structure to prevent dust, water, and steam from entering
Conclusion: DAIHEN 2L39-000158-V3 has precise matching and complete protection, and is the core RF matching component of plasma semiconductor equipment.
DAIHEN 2L39-000158-V3射频自动匹配器 产品展示
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| 6DD2920-0AV0 | 6SC6100-0NC11 | GDC806A0101 |
| 6DD2920-0AU1 | CACR-IR020202FC | UNS0119A-P,V101 |
| 6DD2920-0AU0 | CACR-SR30BE12G-E | 6ES5498-1AA51 |
| 6DD2920-0AS1 | CACR-IR44SEB | UCD240A101 |
| 6DD2920-0AS0 | CACR-A5-SU23GC | PPC902CE101 |
| 6DD1660-0AE0 | CACR-SR10BB1AF | 6ES5497-8MA11 |
| 6DD1660-0AD0 | 6SC9311-3FK15 | PFTL101B 2.0KN |
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