Advanced Energy 3156113-024射频发生器 PDF资料
1.产 品 资 料 介 绍：
Advanced Energy 3156113-024 射频发生器为 Advanced Energy 旗下 Apex 2013 系列射频电源，适用于半导体刻蚀、CVD 等工艺中的高频功率输出与等离子体激发。
输出功率为 2000W，满足中高功率等离子体工艺需求。
工作频率为 13.56MHz 工业科学医疗频段，适配主流工艺设备。
配套备件编号为 660-063437-003，便于采购与替换识别。
需配合模拟遥控器或控制夹具方可正常使用，属于配套操作要求。
内部配置联锁保护机制，机盖未闭合时无法运行，确保操作安全。
适配 LAM RESEARCH Kiyo 系列刻蚀设备，半导体产线兼容性明确。
采用紧凑型机箱设计，便于集成至设备内部或标准机柜。
工业级硬件设计，适应半导体晶圆厂长时间连续运行环境。
面板配备状态显示与操作界面，便于现场监控与参数调整。
内置过压、过流、过热等多重保护电路，异常时自动切断输出。
支持远程控制接口，便于与上位机或自动化系统集成。
输出功率稳定，纹波与噪声低，保障等离子体工艺重复性。
采用高效风冷散热设计，确保大功率输出时温度可控。
原厂品质管控，出厂经性能测试，长期运行可靠性高。
售后维护与备件供应渠道成熟，降低停机维护风险。
结尾： Advanced Energy 3156113-024 以 2kW/13.56MHz 的稳定射频输出和完善的保护机制，为半导体等离子体工艺提供可靠的射频能量保障。
Advanced Energy 3156113-024射频发生器 英文介绍
The Advanced Energy 3156113-024 RF generator is an Apex 2013 series RF power supply under Advanced Energy, suitable for high-frequency power output and plasma excitation in semiconductor etching, CVD and other processes.
The output power is 2000W, meeting the requirements of medium to high power plasma processes.
The working frequency is 13.56MHz in the industrial scientific medical frequency band, suitable for mainstream process equipment.
The supporting spare part number is 660-063437-003, which is convenient for procurement and replacement identification.
Normal use requires the use of a simulated remote control or control fixture, which is a requirement for complementary operation.
Internally configured interlock protection mechanism ensures safe operation when the hood is not closed.
Compatible with LAM RESEARCH Kiyo series etching equipment, with clear compatibility for semiconductor production lines.
Adopting a compact chassis design, it is easy to integrate into equipment interiors or standard cabinets.
Industrial grade hardware design, suitable for long-term continuous operation environment in semiconductor wafer fabs.
The panel is equipped with status display and operation interface, which facilitates on-site monitoring and parameter adjustment.
Built in multiple protection circuits for overvoltage, overcurrent, overheating, etc., automatically cutting off the output in case of abnormalities.
Support remote control interface for easy integration with upper computer or automation system.
Stable output power, low ripple and noise, ensuring the repeatability of plasma process.
Adopting efficient air cooling design to ensure temperature control during high-power output.
Original factory quality control, factory performance testing, and high long-term reliability.
After sales maintenance and spare parts supply channels are mature, reducing the risk of downtime maintenance.
Conclusion: Advanced Energy 3156113-024 provides reliable RF energy guarantee for semiconductor plasma processes with stable RF output of 2kW/13.56MHz and comprehensive protection mechanism.
Advanced Energy 3156113-024射频发生器 产品展示
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4.英文产品
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A6370D Speed measurement card
| 6ES5435-4UA12 | 6SC9811-42BE52 | 6ES5095-8MC03 |
| 6ES5434-7LA12 | CACR-SR15SB1AF | 6ES5375-1LA21 |
| 6ES5432-7LA11 | 6SC6600-4DA01 | 6DD3470-0AC0 |
| 6ES5431-8MD11 | CACR-SR10BE12G-C | 6DD3462-0AB0 |
| 6ES5-431-8MC11 | 6SC6112-0AA00 | 6DD3461-0AE0 |
| 6ES5431-8FA11 | CACR-SR03SZ1SS-Y223 | 6DD3461-0AB0 |
| 6ES5430-8MD11 | 6SC6030-1AG01 | 6DD3460-0AC0 |
| 6ES5430-8MB11 | 6SC9111-2AF2 | 6DD3460-0AB0 |
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