AMAT 0190-B9760真空控制器 PDF资料
1.产 品 资 料 介 绍：
AMAT 0190-B9760 真空控制器为应用材料半导体设备配套的真空系统控制组件，适用于PVD、CVD及刻蚀工艺中的腔室压力监测与控制。
应用材料原厂设计，与设备真空子系统硬件兼容。
兼容Pirani热导式与冷阴极电离规等多种真空传感器。
测量范围覆盖10⁻⁴ Torr至1000 Torr，支持自动量程切换。
采用屏蔽与滤波电路设计，有效抑制射频及等离子体电磁噪声干扰。
通信接口支持标准总线及设备内部专用协议。
响应时间快，Pirani模式小于100ms。
工作温度范围0℃至50℃，适应设备内部电子柜环境。
安装方式为标准插槽或DIN导轨，集成便捷。
采用差分信号处理技术，确保压力读数纯净稳定。
适配半导体前道制造严苛环境，连续运行可靠性高。
关键运行参数支持远程诊断与校准。
电路设计符合SEMI S2/S8安全标准。
作为真空子系统信号中枢，保障薄膜均匀性与刻蚀精度。
结尾： AMAT 0190-B9760 以高可靠性真空信号处理能力，为应用材料半导体设备提供精确的压力反馈与控制支撑。
AMAT 0190-B9760真空控制器 英文介绍
The AMAT 0190-B9760 vacuum controller is a vacuum system control component that is compatible with semiconductor equipment for application materials. It is suitable for monitoring and controlling chamber pressure in PVD, CVD, and etching processes.
The application material is designed by the original factory and is compatible with the hardware of the vacuum subsystem of the equipment.
Compatible with various vacuum sensors such as Pirani thermal conductivity and cold cathode ionization gauges.
The measurement range covers 10 ⁻⁴ Torr to 1000 Torr and supports automatic range switching.
Adopting shielding and filtering circuit design to effectively suppress radio frequency and plasma electromagnetic noise interference.
The communication interface supports standard buses and device specific protocols.
Fast response time, Pirani mode is less than 100ms.
The working temperature range is from 0 ℃ to 50 ℃, suitable for the internal electronic cabinet environment of the equipment.
The installation method is standard slot or DIN rail, which is easy to integrate.
Adopting differential signal processing technology to ensure pure and stable pressure readings.
Adapt to the harsh environment of semiconductor front-end manufacturing, with high reliability for continuous operation.
Key operating parameters support remote diagnosis and calibration.
The circuit design complies with SEMI S2/S8 safety standards.
As the signal center of the vacuum subsystem, it ensures the uniformity and etching accuracy of the thin film.
Conclusion: AMAT 0190-B9760 provides precise pressure feedback and control support for semiconductor equipment with high reliability vacuum signal processing capabilities.
AMAT 0190-B9760真空控制器 产品展示
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| 6415-001-C-N-K | 6DD1681-0AH1 | TRICONEX 3501E |
| 6415-001-C-M-K | 6DD1681-0AG2 | TRICONEX 3601E |
| 6415-001-C-H-K | 6DD1681-0AF4 | TRICONEX 3805H |
| 6410-031-N-N-N | 6DD1681-0AF3 | TRICONEX 3502E |
| 6410-030-N-N-N | 6DD1681-0AE2 | TRICONEX 9668-110 |
| 6410-024-N-N-N | 6DD1681-0AE1 | TRICONEX 4000164-520 |
| 6410-024-C-N-N | 6DD1680-0BB0 | TRICONEX 4118 |
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