NIHON KOSHUHA AMC-T20-V-V射频控制器 PDF资料
1.产 品 资 料 介 绍：
NIHON KOSHUHA AMC-T20-V-V 射频控制器为日本高周波旗下产品，属于2.45GHz频段射频发生器组件，适用于半导体刻蚀、CVD等工艺中的高频能量输出与控制。
工作频率为2.45GHz工业科学医疗频段，适配主流等离子体工艺需求。
输出功率等级为5kW，满足中高功率工艺要求。
常与MKS配套组件协同工作，构成完整射频输出链路。
采用标准射频接口，与反应腔体及匹配器兼容。
具备稳定的高频信号输出能力，保障工艺重复性。
集成射频功率检测与反馈功能，实现闭环控制。
内置多重保护电路，异常时自动切断输出。
工业级设计，适应半导体工厂长时间连续运行。
结构紧凑，便于集成至工艺机台内部。
面板配备状态指示，运行与故障直观显示。
控制方式支持本地操作与远程通信控制。
关键运行参数支持实时读取与监控。
维护简便，故障率低。
广泛适配刻蚀、沉积、表面处理等工艺设备。
结尾： NIHON KOSHUHA AMC-T20-V-V 以稳定的射频输出和可靠硬件设计，为等离子体工艺提供高效能量保障。
NIHON KOSHUHA AMC-T20-V-V射频控制器 英文介绍
The NIHON KOSHUHA AMC-T20-V-V RF controller is a product under the Japanese high-frequency group, belonging to the 2.45GHz frequency band RF generator component, suitable for high-frequency energy output and control in semiconductor etching, CVD and other processes.
The working frequency is 2.45GHz in the industrial, scientific, and medical frequency band, suitable for mainstream plasma process requirements.
The output power level is 5kW, meeting the requirements of medium to high power processes.
Often works in conjunction with MKS components to form a complete RF output link.
Adopting standard RF interface, compatible with reaction chamber and matching device.
Having stable high-frequency signal output capability to ensure process repeatability.
Integrate RF power detection and feedback functions to achieve closed-loop control.
Built in multiple protection circuits, automatically cutting off output in case of abnormalities.
Industrial grade design, suitable for long-term continuous operation of semiconductor factories.
Compact structure, easy to integrate into the interior of process machines.
The panel is equipped with status indicators for intuitive display of operation and faults.
The control mode supports local operation and remote communication control.
Key operating parameters support real-time reading and monitoring.
Easy maintenance and low failure rate.
Widely compatible with process equipment such as etching, deposition, and surface treatment.
Conclusion: NIHON KOSHUHA AMC-T20-V-V provides efficient energy assurance for plasma processes with stable RF output and reliable hardware design.
NIHON KOSHUHA AMC-T20-V-V射频控制器 产品展示
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| 6DD1610-0AH0 | 6SC6103-0SN30 | 6DD2920-0AB1 |
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| 6DD1610-0AG1 | 6SC6112-4DA00 | 6DD2920-0AA0 |
| 6DD1607-0EA2 | 6SC9811-2BE50 | 6DD1681-0CB2 |
| 6DD1607-0EA1 | CACR-05-TF2ES-AF | 6DD1681-0CA8 |
| 6DD1607-0EA0 | CACR-HR10AABY8 | 6DD1681-0CA2 |
| 6DD1607-0CA1 | 6SC6113-0HA00 | ICS TRIPLEX TC -505-02-4M5 |
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