YASKAWA XU-ACP4860 晶圆预对准机 PDF资料
1.产 品 资 料 介 绍：
YASKAWA XU-ACP4860 晶圆预对准机
- 专为 300mm 硅晶圆设计，匹配 AMAT 系列工艺整机
- 高精度视觉检测，精准识别晶圆缺口与中心位置
- 直驱伺服旋转结构，运转震动小、重复定位稳定
- 非接触式检测，避免划伤晶圆表面
- 快速完成定位校正，缩短单片处理节拍
- 不锈钢密封机身，满足洁净室无尘生产标准
- 内置真空吸附固定，晶圆放置不易偏移滑落
- 搭载多重故障报警，边缘破损、缺片自动提示
- 工业隔离电路，抵御车间射频、电机电磁干扰
- 标准通讯接口，可接入产线主控与 MES 系统
- 整机模块化布局，拆装检修维护简单便捷
- 宽温稳定运行，适配恒温无尘车间长期作业
- 内置上电自检程序，快速排查光路、驱动故障
- 体积紧凑小巧，节省设备腔体内部安装空间
- 日本原厂精密配件，连续生产耐用故障率低结尾：YASKAWA XU-ACP4860 定位精准、洁净度达标，是 300mm 晶圆传输工序核心配套设备。
YASKAWA XU-ACP4860 晶圆预对准机 英文介绍
YASKAWA XU-ACP4860 Wafer Pre Alignment Machine
Introduction: YASKAWA XU-ACP4860 is a semiconductor specific pre alignment equipment suitable for 300mm wafers, with high positioning accuracy and fast operation speed, suitable for use in etching and thin film deposition production lines.
Specially designed for 300mm silicon wafers, matched with AMAT series process machines
High precision visual inspection, accurately identifying wafer notches and center positions
Direct drive servo rotating structure, with low vibration during operation and stable repeated positioning
Non contact detection to avoid scratching the wafer surface
Quickly complete positioning correction and shorten the processing cycle of a single chip
Stainless steel sealed body, meeting clean room dust-free production standards
Built in vacuum suction fixation, the wafer is not easily displaced or slipped during placement
Equipped with multiple fault alarms, automatic alerts for edge damage and missing pieces
Industrial isolation circuit to resist workshop RF and motor electromagnetic interference
Standard communication interface, capable of connecting to the production line main control and MES system
Modular layout of the whole machine, simple and convenient disassembly, maintenance and repair
Wide temperature stable operation, suitable for long-term operation in constant temperature and dust-free workshops
Built in power on self-test program, quickly troubleshooting optical path and driver faults
Compact and small in size, saving installation space inside the device cavity
Japanese original precision parts, continuous production, durability, low failure rate
Conclusion: YASKAWA XU-ACP4860 has precise positioning and meets cleanliness standards, making it the core supporting equipment for 300mm wafer transfer processes.
YASKAWA XU-ACP4860 晶圆预对准机 产品展示
3.其他产品
3BUS208720-001模拟量进口伺服驱动器
3BUS208797-001工控系统自动化
3BUS208796-001数字量输入输出卡
4.英文产品
HONEYWELL 05701-A-0361 The spot
HONEYWELL 05701-A-0511 The framework
GE IC752SPL013-BA control panel
| 6DD1640-0AE0 | CACR-PR30BC3AFY161C | 6ES5430-8MB11 |
| 6DD1640-0AD0 | CACR-SR30SF1ASB-Y124 | 3BHE027632R0101 |
| 6DD1640-0AC0 | CACR-SR15VE13S | 6ES5421-8MA12 |
| 6DD1611-0AG0 | CACR-IRA5A5ASF | UCD208A101 |
| 6DD1611-0AF0 | CACR-SR30SF1BFB | 3BHE024747R0101 |
| 6DD1611-0AE0 | 6SC6100-0SA01 | 879-8103-002 |
| 6DD1611-0AD0 | CACR-IR3030CB | PCD231B101 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs
