EDWARDS YT76-Z2-Z20控制器单元 PDF资料
1.产 品 资 料 介 绍：
EDWARDS YT76-Z2-Z20 控制器单元为爱德华真空系统配套的涡轮分子泵控制组件，适用于半导体、科研及工业真空工艺中的泵体驱动与控制。
该型号实际对应爱德华SCU-1600系列涡轮分子泵控制单元。
与爱德华STP系列涡轮分子泵配套使用，驱动泵体高速旋转。
控制方式兼容本地操作与远程通信控制。
支持多组工艺参数设定，适配不同真空条件。
面板配备状态显示屏，运行转速与压力数值实时可读。
集成泵体启动、停止、加速及缓停控制逻辑。
具备过流、过温等多重保护功能，保障泵体安全。
支持前级泵联动控制，实现系统自动启停。
电路采用工业级设计，适应真空系统长时间连续运行。
标准接口设计，便于与上位机或PLC系统集成。
关键运行参数支持远程读取与监控。
结构紧凑，便于安装至标准机柜或设备内部。
维护简便，故障诊断直观。
结尾： EDWARDS YT76-Z2-Z20 以可靠的驱动性能和完备的控制功能，为涡轮分子泵系统提供稳定的运行保障。
The EDWARDS YT76-Z2-Z20 controller unit is a turbomolecular pump control component that is compatible with the Edwards vacuum system. It is suitable for pump body drive and control in semiconductor, scientific research, and industrial vacuum processes.
This model actually corresponds to the Edward SCU-1600 series turbo molecular pump control unit.
Used in conjunction with the Edward STP series turbo molecular pump, it drives the pump body to rotate at high speed.
The control method is compatible with local operation and remote communication control.
Support multiple sets of process parameter settings to adapt to different vacuum conditions.
The panel is equipped with a status display screen, and the operating speed and pressure values can be read in real time.
Integrated pump body start, stop, acceleration, and slow stop control logic.
Equipped with multiple protection functions such as overcurrent and overheating, ensuring the safety of the pump body.
Support front-end pump linkage control to achieve automatic start stop of the system.
The circuit adopts industrial grade design to adapt to long-term continuous operation of vacuum systems.
Standard interface design, easy to integrate with upper computer or PLC system.
Key operating parameters support remote reading and monitoring.
Compact structure, easy to install inside standard cabinets or equipment.
Easy maintenance and intuitive fault diagnosis.
Conclusion: EDWARDS YT76-Z2-Z20 provides stable operational support for turbomolecular pump systems with reliable driving performance and complete control functions.
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| 6ES5101-8UB13 | CACR-JU036A2A | UNS0119A-P V101 |
| 6ES5101-8UA12 | CACR-SR02AB2ER | GVC736CE101 |
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