DAIHEN 3Z39-000001-V1射频自动匹配器 PDF资料
1.产 品 资 料 介 绍：
DAIHEN 3Z39-000001-V1 射频自动匹配器为日本大福（DAIHEN）旗下产品，适用于半导体刻蚀、CVD等等离子体工艺中的射频阻抗自动匹配。
适配13.56MHz工业射频频率，兼容主流射频电源。
响应速度快，匹配时间可达3秒以内。
匹配精度高，整合精度控制在1%以下，有效降低反射功率。
内置优化算法，实现高速准确的自动调谐。
支持多组用户参数集，可适配不同工艺条件。
采用水冷+风冷双散热设计，确保大功率连续运行稳定。
兼容多种通信与控制方式，便于系统集成。
具备过温、过压等保护功能，提升系统安全性。
工业级硬件设计，适应半导体工厂长时间连续运行。
结构紧凑，便于集成至工艺机台内部。
与DAIHEN系列匹配器硬件兼容，替换方便。
关键运行参数支持远程读取与监控。
维护简便，故障率低。
广泛适配刻蚀、沉积、清洗等等离子体工艺设备。
结尾： DAIHEN 3Z39-000001-V1 以高速精准的匹配性能和可靠的硬件防护，为等离子体工艺提供稳定的射频传输保障。
DAIHEN 3Z39-000001-V1射频自动匹配器 英文介绍
The DAIHEN 3Z39-000001-V1 RF automatic matching device is a product under the DAIHEN brand in Japan, suitable for RF impedance automatic matching in plasma processes such as semiconductor etching and CVD.
Compatible with 13.56MHz industrial RF frequency and mainstream RF power supply.
Fast response speed, matching time can reach within 3 seconds.
High matching accuracy, integration accuracy controlled below 1%, effectively reducing reflected power.
Built in optimization algorithm to achieve high-speed and accurate automatic tuning.
Support multiple sets of user parameter sets, adaptable to different process conditions.
Adopting a dual cooling design of water cooling and air cooling to ensure stable and continuous operation at high power.
Compatible with multiple communication and control methods, facilitating system integration.
Equipped with protection functions such as over temperature and over voltage to enhance system security.
Industrial grade hardware design, suitable for long-term continuous operation of semiconductor factories.
Compact structure, easy to integrate into the interior of process machines.
Compatible with DAIHEN series matching hardware, easy to replace.
Key operating parameters support remote reading and monitoring.
Easy maintenance and low failure rate.
Widely compatible with plasma process equipment such as etching, deposition, and cleaning.
Conclusion: DAIHEN 3Z39-000001-V1 provides stable RF transmission guarantee for plasma processes with high-speed and precise matching performance and reliable hardware protection.
DAIHEN 3Z39-000001-V1射频自动匹配器 产品展示
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| 6ES5246-4UA41 | 6SC6110-6AA00 | TRICONEX 3623T |
| 6ES5244-5AA31 | CACR-HR02BAB12 | IC660BBD101 |
| 6ES52431BA11 | 6SC9811-4CH00 | VME-I064 101864 |
| 6ES5243-1AA13 | CACR-HR20BBC | TRICONEX 4508 |
| 6ES5242-5AB21 | 6SC6506-0AA02 | PCD235A101 |
| 6ES5242-1AA32 | CACR-IR10SB | UNITROL 1010 |
| 6ES5241-1AD12 | 6SC6111-5DA00 | TRICONEX 3005 |
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