VAT 09040-PE44-AOF高压闸阀 PDF资料
1.产 品 资 料 介 绍：
VAT 09040-PE44-AOF高压闸阀产品特点
VAT 09040-PE44-AOF是半导体设备专用高压闸阀，核心特点如下：
瑞士VAT公司原厂产品。
气动高压闸阀，用于高真空管路隔离。
适用于刻蚀、沉积等半导体工艺设备。
不锈钢整体阀体，耐腐蚀、耐高温。
楔形密封结构，关闭漏率极低。
双作用气动驱动，动作平缓。
内置位置传感器，实时反馈阀位状态。
可承受高压差冲击。
防卡滞设计，高频启闭可靠。
阀腔洁净设计，不产生颗粒污染。
可耐受180℃腔体高温。
标准法兰接口，方便安装。
配套24VDC电磁阀，可接入自动化控制。
阀体带冷却结构，保护执行气缸。
模块化设计，密封件等可单独更换。
总体而言，VAT 09040-PE44-AOF高压闸阀密封可靠、耐温耐压，是真空工艺腔体隔离的理想选择。
Product Features of VAT 09040-PE44-AOF High Pressure Gate Valve
VAT 09040-PE44-AOF is a high-pressure gate valve specifically designed for semiconductor equipment, with the following core features:
Swiss VAT company's original products.
Pneumatic high-pressure gate valve, used for isolating high vacuum pipelines.
Suitable for semiconductor process equipment such as etching and deposition.
Stainless steel integral valve body, corrosion-resistant and high-temperature resistant.
Wedge shaped sealing structure, with extremely low closure leakage rate.
Double acting pneumatic drive, smooth operation.
Built in position sensor, providing real-time feedback on valve position status.
Can withstand high voltage differential impact.
Anti jamming design, reliable high-frequency opening and closing.
The valve chamber is designed to be clean and does not produce particle pollution.
Can withstand high temperature of 180 ℃ in the chamber.
Standard flange interface for easy installation.
Equipped with 24VDC solenoid valve, it can be connected to automation control.
The valve body is equipped with a cooling structure to protect the executing cylinder.
Modular design, seals, etc. can be replaced separately.
Overall, the VAT 09040-PE44-AOF high-pressure gate valve has reliable sealing, temperature and pressure resistance, and is an ideal choice for vacuum process chamber isolation.
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| 750-P5-G1-S1-LO-A1-R-E | 8005-FCB-10 | 8030-EQ5-138-G2 |
| 750-P5-G1-S1-HI-A20-R | 8005-EPU-1 | 8030-EQ5-138-G1 |
| 750-P5-G1-S1-HI-A20-G-E | 193X737ACG01 | 8030-DRK-300 |
| 750-P5-G1-D5-HI-A20-R | 531X100CCHAPM1 | 8030-DOM-221 |
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