EDWARDS STP-H1303CV3涡轮分子泵 PDF资料
1.产 品 资 料 介 绍：
EDWARDS STP-H1303CV3 涡轮分子泵产品特点
EDWARDS STP-H1303CV3 是一款磁悬浮涡轮分子泵，集成控制器与电源，专为半导体刻蚀、CVD等严苛工艺设计，提供高流速、无油的超高真空环境。
以下是该型号的主要特点：
属于STP高级高流速系列，抽速范围覆盖300至4,500 L/s。
采用五轴主动式磁轴承系统，转子无机械接触，实现无油运行和低振动。
转子与定子采用防腐涂层处理，耐腐蚀性强，适用于离子注入和等离子刻蚀等苛刻制程。
内置氮气吹扫接口，可通过恒定气流稀释腐蚀性气体，保护泵内部精密部件。
全集成型控制器与电源，无需外接电缆和机架，节省设备空间。
具备自动调谐功能和高级诊断功能，便于调试与维护。
设计用于连续高负荷运行，满足半导体产线24/7量产需求。
配备触摸面板控制器，可快速访问关键功能、监控运行状态。
内置接触轴承并涂覆固体润滑剂，作为磁轴承失效时的安全保护。
多组传感器实时监控转子状态，异常时自动停机。
在烘烤和抽气过程中需接入水冷或风冷以控制温度。
标配ISO 250F入口法兰，接口标准化，便于系统集成。
市场流通成熟，有专业的维修保养服务支持。
同系列产品在半导体行业累计交付超25万台，可靠性经长期验证。
适用于半导体制造、科研实验及医疗设备等对真空环境要求严苛的领域。
综上，EDWARDS STP-H1303CV3 凭借其无油洁净、低振动、高可靠性的磁悬浮设计以及高度集成的控制系统，是半导体等高要求制程中实现超高真空的核心设备。
EDWARDS STP-H1303CV3涡轮分子泵 英文介绍
EDWARDS STP-H1303CV3 Turbomolecular Pump Product Features
EDWARDS STP-H1303CV3 is a magnetic levitation turbo molecular pump that integrates a controller and power supply. It is designed specifically for demanding processes such as semiconductor etching and CVD, providing a high flow rate and oil-free ultra-high vacuum environment.
The following are the main features of this model:
Belonging to the STP advanced high flow rate series, the pumping speed range covers 300 to 4500 L/s.
Adopting a five axis active magnetic bearing system, the rotor has no mechanical contact, achieving oil-free operation and low vibration.
The rotor and stator are treated with anti-corrosion coating, which has strong corrosion resistance and is suitable for harsh processes such as ion implantation and plasma etching.
Built in nitrogen purging interface, which can dilute corrosive gases with constant airflow and protect the precision components inside the pump.
Fully integrated controller and power supply, without the need for external cables and racks, saving equipment space.
Equipped with automatic tuning function and advanced diagnostic function, easy to debug and maintain.
Designed for continuous high load operation to meet the 24/7 mass production needs of semiconductor production lines.
Equipped with a touch panel controller, it can quickly access key functions and monitor operating status.
Built in contact bearings and coated with solid lubricant as safety protection in case of magnetic bearing failure.
Multiple sensors monitor the rotor status in real-time and automatically shut down in case of abnormalities.
During the baking and air extraction process, water or air cooling should be connected to control the temperature.
Standard ISO 250F inlet flange, standardized interface for easy system integration.
The market circulation is mature and there is professional maintenance service support.
More than 250000 units of the same series of products have been delivered in the semiconductor industry, and their reliability has been verified for a long time.
Suitable for fields such as semiconductor manufacturing, scientific research experiments, and medical equipment that require strict vacuum environments.
In summary, EDWARDS STP-H1303CV3, with its oil-free, clean, low vibration, high reliability magnetic levitation design and highly integrated control system, is the core equipment for achieving ultra-high vacuum in semiconductor and other high demand processes.
EDWARDS STP-H1303CV3涡轮分子泵 产品展示
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