Kawasaki 0190-85426 晶圆预对准器 PDF资料
1.产 品 资 料 介 绍：
Kawasaki 0190-85426晶圆预对准器作为川崎半导体晶圆传输系统的关键组件，具备以下15条主要产品特点：
中间15条：
专用于200mm和300mm晶圆的边缘检测与中心定位。
采用CCD线阵传感器配合LED光源，精准识别晶圆边缘。
传感器部件可气动移动，适配不同尺寸晶圆的检测需求。
旋转部件带动晶圆旋转，检测缺口和晶圆中心位置。
检测完成后可将缺口旋转至设定角度位置。
采用真空吸附方式固定晶圆，吸附牢固且不损伤晶圆。
配备真空传感器用于检测晶圆是否在位。
旋转轴采用20位增量编码器的AC伺服电机驱动，定位精度高。
对准精度：旋转方向±0.03°，中心位置±0.1mm。
对准速度快，单次检测时间小于1.7秒。
旋转角度无限制，可连续多圈旋转。
适配硅晶圆或石英晶圆材质（石英需调整参数）。
洁净度等级满足ISO Class 1，适用于高洁净环境。
整体重量约7kg，结构紧凑轻便。
需提供CDA气源（0.24-0.26MPa）和真空源（-80至-70kPa）。
结尾：
总结而言，Kawasaki 0190-85426晶圆预对准器具有高精度、快速度、真空吸附和洁净兼容四大核心优势，是半导体晶圆传输系统中确保晶圆精准定位的关键组件。
Kawasaki 0190-85426 晶圆预对准器 英文介绍
Kawasaki 0190-85426 wafer pre aligner, as a key component of Kawasaki Semiconductor wafer transfer system, has the following 15 main product features:
Middle 15:
Specially designed for edge detection and center positioning of 200mm and 300mm wafers.
Using CCD linear array sensors combined with LED light sources to accurately identify wafer edges.
The sensor components can be moved pneumatically to meet the detection needs of wafers of different sizes.
The rotating component drives the wafer to rotate, detecting the gap and the center position of the wafer.
After the inspection is completed, the gap can be rotated to the set angle position.
Using vacuum adsorption to fix the wafer, the adsorption is firm and does not damage the wafer.
Equipped with vacuum sensors to detect whether the wafer is in place.
The rotating shaft is driven by an AC servo motor with a 20 bit incremental encoder, providing high positioning accuracy.
Alignment accuracy: Rotation direction ± 0.03 °, center position ± 0.1mm.
Fast alignment speed, with a single detection time of less than 1.7 seconds.
The rotation angle is unlimited and can rotate continuously for multiple turns.
Adapt to silicon wafer or quartz wafer materials (quartz requires parameter adjustment).
The cleanliness level meets ISO Class 1 and is suitable for high cleanliness environments.
The overall weight is about 7kg, and the structure is compact and lightweight.
CDA gas source (0.24-0.26MPa) and vacuum source (-80 to -70kPa) are required.
Ending
In summary, the Kawasaki 0190-85426 wafer pre aligner has four core advantages: high precision, fast speed, vacuum adsorption, and clean compatibility. It is a key component in ensuring precise wafer positioning in semiconductor wafer transfer systems.
Kawasaki 0190-85426 晶圆预对准器 产品展示
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