AMAT 0190-27355R低温泵 PDF资料
1.产 品 资 料 介 绍：
AMAT 0190-27355R低温泵具备以下15条主要产品特点：
中间15条：
专用于ENDURA平台IMP Ti工艺腔室。
采用低温冷凝原理，实现洁净高真空。
无油无机械旋转部件，避免工艺污染。
R版为原厂翻新再制造，性能接近新品。
抽速快，满足沉积/刻蚀工艺需求。
二级冷头设计，极限真空达10^-7 Torr量级。
内置再生加热功能，可恢复抽气性能。
带温度传感器接口，实时监测冷头温度。
兼容氦气压缩机驱动。
全金属密封，漏率低，适合洁净环境。
法兰标准化，适配ENDURA专用安装位。
带震动隔离设计，减少机械干扰。
支持现场再生操作，无需拆卸。
翻新版经泄漏检测和性能验证。
与ENDURA控制系统完全兼容。
结尾：
总结而言，AMAT 0190-27355R低温泵具有无污染、高真空、快抽速、低成本四大优势，是ENDURA工艺腔室的关键真空组件。
The AMAT 0190-27355R low-temperature pump has the following 15 main product features:
Middle 15:
Specially designed for ENDURA platform IMP Ti process chamber.
Adopting the principle of low-temperature condensation to achieve clean high vacuum.
Oil free and mechanical rotating parts to avoid process pollution.
The R version is refurbished and remanufactured from the original factory, with performance similar to that of a new product.
Fast pumping speed, meeting the requirements of deposition/etching processes.
Secondary cold head design, with an ultimate vacuum of 10 ^ -7 Torr.
Built in regenerative heating function, capable of restoring exhaust performance.
Equipped with temperature sensor interface, real-time monitoring of cold head temperature.
Compatible with helium compressor drivers.
All metal seal, low leakage rate, suitable for clean environment.
Standardization of flanges, compatible with ENDURA dedicated installation positions.
Equipped with vibration isolation design to reduce mechanical interference.
Support on-site regeneration operation without disassembly.
The refurbished version has undergone leak testing and performance verification.
Fully compatible with ENDURA control system.
Ending
In summary, the AMAT 0190-27355R cryogenic pump has four major advantages: pollution-free, high vacuum, fast pumping speed, and low cost. It is a key vacuum component of the ENDURA process chamber.
AMAT 0190-27355R低温泵 产品展示
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| AMAT 0100-76267 | AMAT 0190-76050 | 7702 |
| 3BHB015651P0001 | AMAT 0190-76053 | 701-00610-8 |
| AMAT 0190-37178 | AMAT 0190-76101 | C400/10/1/1/1/00 |
| AMAT 0190-54047 | AMAT 0190-76142 | LDGRB-01 3BSE013177R1 |
| AMAT 0190-01486 | AMAT 0190-76150 | 140CPU67160 |
| AMAT 0190-66024 | AMAT 0190-76185 | 3500/72-01-00 140734-08 |
| AMAT 0190-16010 | AMAT 0190-76252 | 369-LO-0-M-0-0-0-E |
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