NOVELLUS SYSTEMS YSC-BSA01038PLOS / 02-294832-00 PDF资料
1.产 品 资 料 介 绍：
NOVELLUS SYSTEMS YSC-BSA01038PLOS / 02-294832-00 是诺发系统（现属泛林半导体）半导体设备中专用于晶圆传输的精密机械模块，其核心特点总结如下：
型号标识包含YSC-BSA01038PLOS和02-294832-00两个部件编号。
02-294832-00对应设备中的晶圆平台升降机或传输机构。
适用于诺发系统的薄膜沉积（CVD/PVD）等半导体工艺设备。
用于晶圆在工艺腔室与传输模块之间的精确升降与搬运。
采用高精度步进或伺服电机驱动，定位精度高。
具备平稳的升降速度控制，减少晶圆震动与颗粒污染。
模块化设计，便于在设备中进行拆卸与更换。
符合半导体洁净室标准，运动部件低发尘量。
通常与设备主控制器通过专用总线或I/O接口通信。
配备位置传感器，用于检测升降机构的上下极限位置。
诺发系统于2012年被泛林半导体（Lam Research）收购。
该部件作为原厂备件，主要用于旧款诺发设备的维修替换。
常用于诺发200mm或300mm晶圆制造设备。
采用耐磨材料制造，保障长期运行的机械稳定性。
是晶圆传输系统中实现垂直方向片盒升降的关键执行单元。
结尾： 综上所述，NOVELLUS SYSTEMS YSC-BSA01038PLOS / 02-294832-00 具有专用性强、定位精度高及适配诺发设备平台的特点，是半导体薄膜沉积设备中保障晶圆平稳传输的重要机械部件。
NOVELLUS SYSTEMS YSC-BSA01038PLOS / 02-294832-00 英文介绍
NOVELLUS SYSTEMS YSC-BSA01038PLOS/02-294832-00 is a precision mechanical module specifically designed for wafer transfer in semiconductor equipment of NOVELLUS Systems (now part of Panlin Semiconductor). Its core features are summarized as follows:
The model identification includes two part numbers: YSC-BSA01038PLOS and 02-294832-00.
02-294832-00 corresponds to the wafer platform lift or transport mechanism in the equipment.
Suitable for semiconductor process equipment such as CVD/PVD for Nofa systems.
Used for precise lifting and handling of wafers between process chambers and transfer modules.
Using high-precision stepper or servo motor drive, with high positioning accuracy.
Equipped with smooth lifting speed control, reducing wafer vibration and particle contamination.
Modular design facilitates disassembly and replacement within the device.
Compliant with semiconductor cleanroom standards, with low dust emissions from moving parts.
Usually communicates with the device main controller through a dedicated bus or I/O interface.
Equipped with position sensors for detecting the upper and lower limit positions of the lifting mechanism.
Nofa Systems was acquired by Lam Research in 2012.
This component is used as an original spare part mainly for the maintenance and replacement of old Nofa equipment.
Commonly used in Nofa 200mm or 300mm wafer manufacturing equipment.
Made of wear-resistant materials to ensure long-term mechanical stability.
It is a key execution unit in the wafer transfer system that enables vertical box lifting and lowering.
Conclusion: In summary, NOVELLUS SYSTEMS YSC-BSA01038PLOS/02-294832-00 has the characteristics of strong specificity, high positioning accuracy, and adaptability to Nofa equipment platforms. It is an important mechanical component in semiconductor thin film deposition equipment to ensure smooth wafer transfer.
NOVELLUS SYSTEMS YSC-BSA01038PLOS / 02-294832-00 产品展示
3.其他产品
A-B 349896-A01 逆变器模块
Bently 3500/91-02-00 190782-01 通信网关模块
PPD117A3011 3BHE030410R3011激励控制器模块
IS215WETAH1BB Control System Card
IS200WETAH1AGC gas turbine system
D20 EME 2400-21004 pressure transmitter
| 0061386-004 | HG934A6 | HG100A6 |
| SL5120RGACB | HM706A6 | HZ170A601 |
| AMAT 0100-90704 | TP-2370-5 | MVME5500-0161 |
| AMAT 0100-89004 | TAP3000-1 | MVME55006E-0163R |
| AMAT 0100-11025 | TP-7230-0 | PXIE-4142 |
| AMAT 0100-35126 | TP-2441-5 | 3152335-004 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs
