AMAT 0010-02977射频匹配器 PDF资料 

1.产 品 资 料 介 绍：

AMAT 0010-02977 射频匹配器是应用材料（Applied Materials）专用于半导体PVD设备的自动阻抗匹配组件，其核心特点总结如下：

1. 专用于物理气相沉积（PVD）工艺。

2. 部件编号0010-02977，硬件版本Rev. 003。

3. 工作频率13.56 MHz，符合半导体工业标准。

4. 适用于5kW以下射频功率场景。

5. 具备自动阻抗匹配功能。

6. 内置正向/反射功率监测电路。

7. 配备步进电机驱动，动态调节匹配参数。

8. 采用水冷或风冷散热设计。

9. 配备DB25控制接口及同轴射频连接器。

10. 支持远程通信，可与上位机交互。

11. 具备过压、过温、过流等多重保护。

12. 采用低噪音无风扇设计。

13. 专用于AMAT Centura、Endura等PVD平台。

14. 常用于旧型号AMAT设备的备件替换。

15. 是射频能量高效耦合的关键组件。

结尾： 综上所述，AMAT 0010-02977 射频匹配器具有工艺专用性强、匹配精度高及适配AMAT设备平台的特点，是PVD系统中保障射频能量传输稳定的重要部件。

AMAT 0010-02977射频匹配器  英文介绍

AMAT 0010-02977 RF Matcher is an automatic impedance matching component specifically designed for semiconductor PVD equipment using Applied Materials. Its core features are summarized as follows:

Specially designed for physical vapor deposition (PVD) processes.

Part number 0010-02977, hardware version Rev. 003.

The operating frequency is 13.56 MHz, which complies with semiconductor industry standards.

Suitable for RF power scenarios below 5kW.

Equipped with automatic impedance matching function.

Built in forward/reflected power monitoring circuit.

Equipped with stepper motor drive, dynamically adjust matching parameters.

Adopting water-cooled or air-cooled heat dissipation design.

Equipped with DB25 control interface and coaxial RF connector.

Supports remote communication and can interact with the upper computer.

Equipped with multiple protections such as overvoltage, overheating, and overcurrent.

Adopting a low-noise fanless design.

Dedicated to PVD platforms such as AMAT Centura and Endura.

Commonly used for spare parts replacement of old AMAT equipment models.

It is a key component for efficient coupling of RF energy.

Conclusion: In summary, the AMAT 0010-02977 RF matching device has the characteristics of strong process specificity, high matching accuracy, and adaptability to AMAT equipment platforms. It is an important component in PVD systems to ensure stable RF energy transmission.

AMAT 0010-02977射频匹配器 产品展示   

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型号：AMAT 0010-02977射频匹配器

质保：一年

成色：全新/二手

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