Daihen 3D80-000826-V4功率发生器 PDF资料
1.产 品 资 料 介 绍：
Daihen 3D80-000826-V4 功率发生器是日本大畑（Daihen）株式会社生产、配套东京电子（TEL）设备的专用射频电源模块，其核心特点总结如下：
该型号实际对应 Daihen RGA-10D-V 型 RF 射频功率发生器。
输出频率为标准工业射频 13.56 MHz。
额定输出功率为 1kW（1000瓦）。
由日本大畑株式会社制造，工艺质量稳定可靠。
部件编号 TEL 3D80-000826-V4，其中 V4 表示特定硬件版本。
专为东京电子（Tokyo Electron）的半导体设备配套设计。
核心用途是作为等离子体电源，用于刻蚀、沉积等半导体工艺腔室。
采用风冷散热设计，结构内部可见铜质暴露部件。
具备过载、过热、反射功率检测等多重射频保护功能。
输出阻抗通常匹配 50 欧姆标准工业负载。
支持远程控制接口，可集成于自动化半导体生产线。
频率稳定度高，满足高精度工艺对射频源的要求。
采用模块化设计，便于在设备中进行更换维护。
适用于半导体制造、太阳能面板生产、真空镀膜等工业领域。
作为二手工业部件流通，常用于旧型号 TEL 设备的备件替换。
结尾： 综上所述，Daihen 3D80-000826-V4（RGA-10D-V）功率发生器具有输出稳定、专用于 TEL 半导体设备及维修适配性强的特点，是半导体刻蚀与沉积系统中关键的射频能源供应模块。
Daihen 3D80-000826-V4功率发生器 英文介绍
The Daihen 3D80-000826-V4 power generator is a specialized RF power module produced by Daihen Corporation in Japan and used in conjunction with Tokyo Electronics (TEL) equipment. Its core features are summarized as follows:
This model actually corresponds to the Daihen RGA-10D-V RF power generator.
The output frequency is standard industrial RF 13.56 MHz.
The rated output power is 1kW (1000 watts).
Made by Daihata Corporation in Japan, the process quality is stable and reliable.
Part number TEL 3D80-000826-V4, where V4 represents a specific hardware version.
Specially designed to support semiconductor equipment for Tokyo Electron.
The core use is as a plasma power source for semiconductor process chambers such as etching and deposition.
Adopting air-cooled heat dissipation design, exposed copper components can be seen inside the structure.
Equipped with multiple RF protection functions such as overload, overheating, and reflected power detection.
The output impedance is typically matched to a 50 ohm standard industrial load.
Supports remote control interface and can be integrated into automated semiconductor production lines.
High frequency stability, meeting the requirements of high-precision processes for RF sources.
Adopting modular design for easy replacement and maintenance in the equipment.
Suitable for industrial fields such as semiconductor manufacturing, solar panel production, vacuum coating, etc.
As a second-hand industrial component in circulation, it is commonly used for replacing spare parts of old TEL equipment models.
Conclusion: In summary, the Daihen 3D80-000826-V4 (RGA-10D-V) power generator has the characteristics of stable output, dedicated to TEL semiconductor equipment, and strong maintenance adaptability. It is a key RF energy supply module in semiconductor etching and deposition systems.
Daihen 3D80-000826-V4功率发生器 产品展示
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