SHINKO BX80-070280-11搬运转移机器人 PDF资料 

1.产 品 资 料 介 绍：

SHINKO BX80-070280-11 是日本 Shinko 公司生产的一款半导体晶圆搬运机器人，专为自动化生产环境中安全、高效地传输晶圆而设计，适用于刻蚀、沉积等半导体制造工艺环节。

产品特点（15条）

1. 专用于半导体晶圆的自动化搬运和传输

2. 采用两级真空拾取设计，兼顾高真空与低真空吸力

3. 低真空保证晶圆边缘稳固持力，高真空实现表面牢固吸附

4. 最大支持200mm晶圆尺寸，载荷容量5kg

5. 晶圆装卸时间仅1.2秒，传输效率高

6. 转速可在0至100 RPM范围内连续调节

7. 配备键控旋转单元，消除离轴装载风险

8. 边缘间隙仅2.5mm，适合安全处理小尺寸晶圆

9. 12V直流电源供电，功耗低

10. 系统真空压力要求0.1至0.2MPa

11. IP65防护等级，防尘防水

12. 轻量化紧凑设计，易于集成安装

13. 内置气垫单元，运行压力过低时自动停机

14. 可连接PLC和触摸面板，支持远程控制

15. 设有扩展端口，可增加附加真空卡盘

结尾

BX80-070280-11 以高速传输、可靠真空吸附及紧凑防护设计为核心优势，是半导体产线中提升晶圆搬运效率与安全性的可靠选择。

SHINKO BX80-070280-11搬运转移机器人  英文介绍

SHINKO BX80-070280-11 is a semiconductor wafer handling robot produced by Shinko Corporation in Japan. It is designed for safe and efficient transfer of wafers in automated production environments and is suitable for semiconductor manufacturing processes such as etching and deposition.

Product features (15 items)

Dedicated to automated handling and transportation of semiconductor wafers

Adopting a two-stage vacuum pickup design, balancing high vacuum and low vacuum suction

Low vacuum ensures stable support at the edge of the wafer, while high vacuum achieves firm surface adhesion

Maximum support for 200mm wafer size, load capacity 5kg

Wafer loading and unloading time is only 1.2 seconds, with high transfer efficiency

The speed can be continuously adjusted within the range of 0 to 100 RPM

Equipped with a key controlled rotating unit to eliminate the risk of off-axis loading

The edge gap is only 2.5mm, suitable for safe handling of small-sized wafers

12V DC power supply, low power consumption

The vacuum pressure requirement for the system is 0.1 to 0.2 MPa

IP65 protection level, dustproof and waterproof

Lightweight and compact design, easy to integrate and install

Built in air cushion unit, automatically shuts down when operating pressure is too low

Can connect PLC and touch panel, supports remote control

Equipped with expansion ports to add additional vacuum chucks

ending

BX80-070280-11, with its core advantages of high-speed transmission, reliable vacuum adsorption, and compact protection design, is a reliable choice for improving wafer handling efficiency and safety in semiconductor production lines.

SHINKO BX80-070280-11搬运转移机器人 产品展示   

3.其他产品

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Schneider 140CPU43412A 控制器模块
Schneider 140CPS11100模拟输入模块

4.其他英文产品

1MRB200059C coupler module
1MRB15004R0001 inverter control unit
Bentley 1900/65A-00-00-01-00-00 Vibration Monitor

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs 

型号：SHINKO BX80-070280-11搬运转移机器人

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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