DAIHEN NGA-50A-V射频发生器 PDF资料
1.产 品 资 料 介 绍:
DAIHEN NGA-50A-V 是大亨(DAIHEN)旗下50W级别的射频发生器,常用于半导体刻蚀、CVD及等离子清洗等精密工艺。
产品特点(15条)
输出频率推测为13.56MHz工业标准
50W输出功率,适合小型腔体精密工艺
高效电路设计,能量损耗低
闭环反馈控制,功率输出精准
可与自动匹配器协同工作
支持连续波和脉冲调制两种模式
匹配范围宽,适应复杂负载变化
内置过压、过流、过温及驻波比保护
配备RS-232C/485通信接口
19英寸机架式紧凑设计
前面板带显示屏,可本地查看参数
自身反射功率低,效率高
长时间运行稳定性好
支持外部信号远程控制启停
强制风冷散热,适合持续负荷
结尾
NGA-50A-V 以稳定输出和紧凑结构为核心优势,是精密等离子体工艺的可靠选择,选型时需确认频率匹配及通信协议。
DAIHEN NGA-50A-V is a 50W level RF generator under DAIHEN, commonly used in precision processes such as semiconductor etching, CVD, and plasma cleaning.
Product features (15 items)
The estimated output frequency is 13.56MHz according to the industry standard
50W output power, suitable for precision manufacturing of small cavities
Efficient circuit design with low energy loss
Closed loop feedback control, precise power output
Can work in conjunction with an automatic matching machine
Supports both continuous wave and pulse modulation modes
Wide matching range, adaptable to complex load changes
Built in overvoltage, overcurrent, overtemperature, and standing wave ratio protection
Equipped with RS-232C/485 communication interface
19 inch rack mounted compact design
Front panel with display screen, allowing for local viewing of parameters
Low self reflection power, high efficiency
Long term operation with good stability
Support remote control of start and stop through external signals
Forced air cooling for heat dissipation, suitable for continuous load
ending
NGA-50A-V has stable output and compact structure as its core advantages, making it a reliable choice for precision plasma technology. When selecting, it is necessary to confirm frequency matching and communication protocol.

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