TURBOVAC 361涡轮分子泵 PDF资料
1.产 品 资 料 介 绍：
TURBOVAC 361涡轮分子泵 英文介绍
TURBOVAC 361 Turbomolecular Pump is a precision vacuum acquisition equipment used in high vacuum systems, commonly used in semiconductor processes, vacuum coating, analytical instruments, and scientific research experimental systems. It is mainly used to achieve high vacuum or even ultra-high vacuum environments with the cooperation of the front-end pump.
Intermediate characteristics:
Adopting a multi-stage high-speed rotating impeller structure, gas extraction is achieved through momentum transfer
Suitable for high vacuum and ultra-high vacuum conditions, with stable pumping efficiency
Has good pumping performance for common gases such as hydrogen, nitrogen, argon, etc
Usually needs to be used in conjunction with a front-end pump (such as a dry pump or rotary vane pump)
Capable of operating at high speeds, with precise machining and strict dynamic balancing control of the rotor system
Low vibration level is beneficial for improving system stability and measurement accuracy
Adopting magnetic levitation or ceramic bearing structure (depending on the specific model configuration) to reduce mechanical wear
There is basically no risk of oil pollution during operation, suitable for clean process environments
The start-up and shutdown processes are controlled and equipped with a soft start protection mechanism
Speed regulation and status monitoring can be achieved through a controller
Equipped with multiple safety protection functions such as over speed, over temperature, and overload
High requirements for installation posture and environment, need to avoid impact and strong vibration
Widely used in high-end equipment such as vacuum coating equipment, mass spectrometers, electron microscopy systems, etc
Strong adaptability to gas load, maintaining stable operation even during process fluctuations
Compact structure, conducive to integration in complex vacuum systems
ending:
Overall, the TURBOVAC 361 turbomolecular pump has important application value in the field of high-end vacuum technology due to its high speed, high cleanliness pumping ability, and stable and reliable operating characteristics. It is one of the key equipment for achieving high vacuum environments.
TURBOVAC 361涡轮分子泵 产品展示
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