STEC SEC-4400质量流量控制器 PDF资料
1.产 品 资 料 介 绍：
STEC SEC-4400 采用金属密封结构，专为半导体、光伏等严苛气体控制场景设计，主要特点如下：
中间（13条）
控制精度达 ±1.0% F.S.，满足精密工艺需求
重复性为 ±0.2% F.S.，多次运行一致性高
响应时间小于 1 秒（典型 500ms），实时跟随指令
金属密封结构，外部泄漏率低于 5×10⁻¹⁰ Pa·m³/s
量程比 50:1，单台设备覆盖更宽流量范围
兼容 N₂、Ar、O₂、H₂、CF₄、SiH₄ 等多种气体
最大工作压力 1.0 MPa，适应高压供气场景
支持 0–5V / 4–20mA 模拟信号与 RS485 通讯
零点及满量程温漂小（＜±0.2% F.S./℃）
采用压电陶瓷阀，无机械摩擦，寿命长
安装方向不敏感，倾斜仍可稳定输出
全不锈钢机身，结构紧凑、坚固耐用
工作功耗低，发热量小，适合长期运行
结尾
综上，SEC-4400 兼具高精度、快速响应与可靠密封，是工业气体输送控制的实用选择。
STEC SEC-4400质量流量控制器 英文介绍
The STEC SEC-4400 adopts a metal sealed structure, designed specifically for harsh gas control scenarios such as semiconductors and photovoltaics. Its main features are as follows:
Middle (13 items)
The control accuracy reaches ± 1.0% F.S., meeting the requirements of precision processes
The repeatability is ± 0.2% F.S., and the consistency is high after multiple runs
Response time less than 1 second (typical 500ms), real-time following of instructions
Metal sealed structure, with an external leakage rate of less than 5 × 10 ⁻¹⁰ Pa · m ³/s
Range ratio 50:1, single device covers a wider flow range
Compatible with various gases such as N ₂, Ar, O ₂, H ₂, CF ₄, SiH ₄, etc
Maximum working pressure of 1.0 MPa, suitable for high-pressure gas supply scenarios
Supports 0-5V/4-20mA analog signal and RS485 communication
Zero and full-scale temperature drift is small (＜ ± 0.2% F.S./℃)
Adopting piezoelectric ceramic valve, no mechanical friction, long service life
Installation direction insensitive, stable output even when tilted
All stainless steel body, compact structure, sturdy and durable
Low working power consumption, low heat generation, suitable for long-term operation
ending
Overall, SEC-4400 combines high precision, fast response, and reliable sealing, making it a practical choice for industrial gas transportation control.
STEC SEC-4400质量流量控制器 产品展示
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| 369-Hi-R-M-0-0-H-0 | 531X306LCCBDM2 | IC3603A279A |
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