Mitsubishi  FTI-600D-T6-0094 T-920520驱动电源单元  PDF资料

1.产 品 资 料 介 绍：

Mitsubishi FTI-600D-T6-0094 / T-920520

产品特点（5条）

1. 属于三菱涡轮分子泵控制器系列（FT-600D），并非通用伺服驱动器。

2. 实物重量约 19.83 kg，属于带电源单元（HVP P.S）的控制器整机形态。

3. 作为涡轮分子泵控制器，其核心功能是为分子泵电机提供驱动电源并控制转速。

4. 采用整机一体化结构，电源单元与控制器集成于同一机壳内。

5. 属于半导体/真空设备相关的控制单元，适配分子泵系统的驱动与供电需求。

应用领域（10条）

1. 半导体制造设备真空腔体的分子泵驱动控制

2. 真空镀膜设备的抽气系统控制器维修替换

3. 电子显微镜真空系统的分子泵电源单元

4. 质谱仪真空腔分子泵控制器备件

5. 老旧三菱分子泵控制器的板级/整机替换

6. 真空炉设备抽气泵驱动单元维护

7. 半导体设备保修期外真空系统维修

8. 二手真空设备翻新时的控制器更换

9. 真空系统维修培训中的控制器识别实操

10. 停产真空设备延寿维护的备件储备

总结：Mitsubishi FTI-600D-T6-0094 / T-920520 是三菱涡轮分子泵控制器整机（含电源单元），主要用于真空系统的分子泵驱动控制与维修替换。

Mitsubishi  FTI-600D-T6-0094 T-920520驱动电源单元   英文介绍

Mitsubishi FTI-600D-T6-0094 / T-920520

Product features (5 items)

Belongs to the Mitsubishi Turbo Molecular Pump Controller Series (FT-600D), not a universal servo driver.

The physical weight is approximately 19.83 kg, and it belongs to the form of a complete controller with a power supply unit (HVP P.S).

As a turbo molecular pump controller, its core function is to provide driving power for the molecular pump motor and control the speed.

Adopting an integrated structure, the power unit and controller are integrated into the same chassis.

Belonging to control units related to semiconductor/vacuum equipment, adapted to the driving and power supply requirements of molecular pump systems.

Application areas (10 items)

Molecular pump drive control of vacuum chamber in semiconductor manufacturing equipment

Maintenance and replacement of the exhaust system controller for vacuum coating equipment

Molecular pump power supply unit for electron microscope vacuum system

Spare parts for mass spectrometer vacuum chamber molecular pump controller

Board level/whole machine replacement of old Mitsubishi molecular pump controllers

Maintenance of vacuum furnace equipment vacuum pump drive unit

Vacuum system maintenance outside the warranty period of semiconductor equipment

Controller replacement during renovation of second-hand vacuum equipment

Practical operation of controller recognition in vacuum system maintenance training

Spare parts reserve for extended maintenance of shutdown vacuum equipment

Summary: Mitsubishi FTI-600D-T6-0094/T-920520 is a complete Mitsubishi turbo molecular pump controller (including power unit), mainly used for molecular pump drive control and maintenance replacement in vacuum systems.

Mitsubishi  FTI-600D-T6-0094 T-920520驱动电源单元   产品图片

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型号：Mitsubishi  FTI-600D-T6-0094 T-920520驱动电源单元

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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