FEI 1036162等离子清洁器单元 PDF资料
FEI 1036162 等离子清洁器单元是 FEI 电子显微镜(SEM/FIB)系统中用于样品腔原位清洁的选配组件,通过产生氧自由基去除样品及腔体表面的碳氢污染物。
产品特点(5条)
原位清洁设计:在电镜样品腔内直接进行清洁,无需取出样品,减少污染暴露。
氧自由基去污:产生氧自由基与碳氢化合物反应,生成可被泵抽走的 CO、CO₂ 气体。
低真空工作条件:在类似低真空模式的压力条件下运行。
短时清洁流程:常规清洁时间 1–5 分钟可设,配合 cryo cleaning 效果更佳。
系统集成控制:通过电镜操作软件启动清洁程序,使用预设的 Plasma Cleaning Alignment 参数。
产品应用领域(10条)
FEI SEM 样品腔原位清洁
FEI FIB/SEM 双束系统样品清洁
高分辨率成像前污染物去除
碳氢污染导致的图像暗化改善
样品表面薄污染层清理
真空腔体部件清洁维护
电镜日常维保流程
生物/材料样品成像前处理
低真空模式下的原位清洁
FEI 电镜系统选配功能集成
结尾
FEI 1036162 等离子清洁器单元是 FEI 电镜系统的样品腔原位清洁组件,以氧自由基去污和软件集成控制为核心功能,适用于高分辨率成像前的污染物去除场景
The FEI 1036162 plasma cleaner unit is an optional component used for in-situ cleaning of sample chambers in the FEI electron microscope (SEM/FIB) system, which removes carbon and hydrogen pollutants from the sample and chamber surfaces by generating oxygen free radicals.
Product features (5 items)
In situ cleaning design: Clean directly inside the electron microscope sample chamber without removing the sample, reducing contamination exposure.
Oxygen free radical decontamination: generates oxygen free radicals that react with hydrocarbons to produce CO and CO ₂ gases that can be pumped away.
Low vacuum working conditions: operate under pressure conditions similar to low vacuum mode.
Short term cleaning process: The regular cleaning time can be set to 1-5 minutes, and it is more effective when combined with cryo cleaning.
System integration control: Start the cleaning program through the electron microscope operating software and use the preset Plasma Cleaning Alignment parameters.
Product application areas (10 items)
In situ cleaning of FEI SEM sample cavity
FEI FIB/SEM dual beam system sample cleaning
Removal of pollutants before high-resolution imaging
Improvement of image darkening caused by hydrocarbon pollution
Cleaning of thin contamination layer on sample surface
Cleaning and maintenance of vacuum chamber components
Daily maintenance process of electron microscope
Pre processing of biological/material sample imaging
In situ cleaning in low vacuum mode
FEI Electron Microscope System Optional Function Integration
ending
The FEI 1036162 plasma cleaner unit is an in-situ cleaning component for the sample chamber of the FEI electron microscopy system, with oxygen free radical decontamination and software integration control as its core functions, suitable for pollutant removal scenarios before high-resolution imaging

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