Lam 666-045257-403光纤温度转换器 PDF资料

1.产 品 资 料 介 绍：

Lam 666-045257-403 光纤温度转换器

产品应用领域（10 条）

1. Lam Research 刻蚀机腔体温度信号采集与转换

2. 半导体等离子刻蚀工艺中的温度监控

3. 静电吸盘（ESC）温度反馈回路

4. 射频环境下的抗干扰温度测量

5. 刻蚀设备温度传感器信号光电隔离

6. 半导体设备维护与备件替换

7. 腔体温度异常报警与联锁保护

8. 老旧 Lam 设备温度转换模块应急更换

9. 刻蚀工艺稳定性维护与故障诊断

10. 半导体产线设备预防性维护

产品参数（5 条）

1. 产品类型：光纤温度转换器（Fiber Optic Temperature Converter），Lam Research 半导体设备备件

2. 品牌归属：Lam Research（泛林半导体）

3. 系列参考：同系列 666-045257-006 采用 Photon FGA-0211F 光路组件及 FTC-DIN-SSMA-2512 接口

4. 功能定位：将光纤传输的温度信号转换为标准电信号，供给设备主控系统

5. 抗干扰设计：全光电解耦，免疫射频/电磁干扰，适用于等离子刻蚀腔体环境

总结：Lam 666-045257-403 为 Lam Research 刻蚀设备用光纤温度转换器，属于 666-045257 系列，主要用于等离子工艺腔体的温度信号采集与转换，适用于设备维护替换与备件储备。

Lam 666-045257-403光纤温度转换器  英文介绍

Lam 666-045257-403 Fiber Optic Temperature Converter

Product application areas (10 items)

Lam Research Etching Machine Chamber Temperature Signal Collection and Conversion

Temperature Monitoring in Semiconductor Plasma Etching Process

Temperature feedback loop of electrostatic suction cup (ESC)

Anti interference temperature measurement in RF environment

Temperature sensor signal photoelectric isolation for etching equipment

Semiconductor equipment maintenance and spare parts replacement

Abnormal temperature alarm and interlock protection of the cavity

Emergency replacement of temperature conversion module for old Lam equipment

Stability maintenance and fault diagnosis of etching process

Preventive maintenance of semiconductor production line equipment

Product parameters (5 items)

Product Type: Fiber Optic Temperature Converter, Lam Research Semiconductor Equipment Spare Parts

Brand affiliation: Lam Research (Panlin Semiconductor)

Series reference: The same series 666-045257-006 adopts Photon FGA-0211F optical path components and FTC-DIN-SSMA-2512 interface

Functional positioning: Convert temperature signals transmitted through optical fibers into standard electrical signals and supply them to the main control system of the equipment

Anti interference design: all-optical electrolytic coupling, immune to radio frequency/electromagnetic interference, suitable for plasma etching chamber environment

Summary: Lam 666-045257-403 is a fiber optic temperature converter for Lam Research etching equipment, belonging to the 666-045257 series. It is mainly used for temperature signal acquisition and conversion in plasma process chambers, and is suitable for equipment maintenance, replacement, and spare parts reserve.

Lam 666-045257-403光纤温度转换器  产品图片

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型号：Lam 666-045257-403光纤温度转换器

质保：一年

成色：全新/二手

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