LAM 853-276839-050射频电源组件 PDF资料
LAM 853-276839-050 射频电源组件
产品应用领域(10 条)
半导体等离子刻蚀设备射频功率输出
化学气相沉积设备射频电源配套
物理气相沉积设备射频驱动
等离子清洗设备射频功率供给
刻蚀腔体射频匹配网络前端
老旧 Lam Research 设备射频模块替换
半导体产线射频电源故障应急维修
设备维护备件储备
二手半导体设备翻新与调试
射频电源系统集成配套
产品参数(5 条)
产品类型:射频电源组件(RF Power Assembly)
品牌归属:Lam Research
型号标识:853-276839-050,版本标识 Rev B
功能定位:为半导体工艺设备提供射频功率输出
应用设备类型:等离子刻蚀、沉积等半导体制造设备
总结:LAM 853-276839-050 为 Lam Research 射频电源组件(Rev B),主要用于半导体等离子工艺设备的射频功率供给,适用于设备维修替换与备件储备
LAM 853-276839-050射频电源组件 英文介绍
LAM 853-276839-050 RF power supply component
Product application areas (10 items)
RF power output of semiconductor plasma etching equipment
RF power supply matching for chemical vapor deposition equipment
Radio frequency drive for physical vapor deposition equipment
RF power supply for plasma cleaning equipment
Etching cavity RF matching network front-end
Replacement of RF module for old Lam Research equipment
Emergency maintenance of RF power supply failure in semiconductor production line
Equipment maintenance spare parts reserve
Renovation and debugging of second-hand semiconductor equipment
RF power system integration and matching
Product parameters (5 items)
Product Type: RF Power Assembly
Brand affiliation: Lam Research
Model identification: 853-276839-050, version identification Rev B
Functional positioning: Provide RF power output for semiconductor process equipment
Application equipment type: semiconductor manufacturing equipment such as plasma etching and deposition
Summary: LAM 853-276839-050 is a Lam Research RF power supply component (Rev B), mainly used for RF power supply of semiconductor plasma process equipment, suitable for equipment maintenance, replacement, and spare parts reserve

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