Azbil SPG0ZT13RZS000RL 电容隔膜真空计 PDF资料

1.产 品 资 料 介 绍：

Azbil SPG0ZT13RZS000RL 电容隔膜真空计

产品应用领域（10 条）

1. 半导体制造设备中的高精度压力控制

2. 真空炉高温热处理工艺的压力监测

3. 真空泵极限真空度与抽速特性评估

4. 冷冻干燥设备的真空度监控

5. 原子层沉积工艺的压力控制

6. 溅射与蒸发镀膜腔体压力稳定

7. 真空互锁与安全联锁保护

8. 卤素等腐蚀性气体环境的真空测量

9. 高温真空工艺防凝结监测

10. 真空量值的校准与标准传递

产品参数（3 条）

1. 测量原理与精度：静电容式隔膜原理，单晶蓝宝石受压部，标准精度 ±0.25% Reading（自加热≥160°C 时为 ±0.5% Reading）

2. 压力范围与耐压：覆盖 0-20 Pa 至 0-133.32 kPa abs 多量程，允许压力 110～200 kPa abs，爆破压力 700 kPa abs

3. 输出与电气规格：输出 DC 0～10 V（负载 10kΩ 以上），供电 ±15 Vdc 或 24 Vdc，响应速度典型 35 ms，接气部材质含蓝宝石、因科镍合金及 SUS316L

总结：Azbil SPG0ZT13RZS000RL 电容隔膜真空计兼具蓝宝石隔膜的耐腐蚀性与静电容原理的高精度，适用于半导体、真空炉、镀膜及冻干等真空测量场景。

Azbil SPG0ZT13RZS000RL 电容隔膜真空计  英文介绍

Azbil SPG0ZT13RZS000RL Capacitive Diaphragm Vacuum Gauge

Product application areas (10 items)

High precision pressure control in semiconductor manufacturing equipment

Pressure Monitoring of High Temperature Heat Treatment Process in Vacuum Furnace

Evaluation of Extreme Vacuum Degree and Pumping Speed Characteristics of Vacuum Pump

Vacuum monitoring of freeze-drying equipment

Pressure Control of Atomic Layer Deposition Process

Sputtering and evaporation coating chamber pressure stability

Vacuum interlock and safety interlock protection

Vacuum measurement of corrosive gas environments such as halogens

Monitoring of Anti Condensation in High Temperature Vacuum Process

Calibration and standard transfer of vacuum values

Product parameters (3 items)

Measurement principle and accuracy: electrostatic capacitive diaphragm principle, single crystal sapphire compression part, standard accuracy ± 0.25% Reading (± 0.5% Reading when self heating ≥ 160 ° C)

Pressure range and pressure resistance: covering multiple ranges from 0-20 Pa to 0-133.32 kPa abs, allowing a pressure of 110-200 kPa abs and a burst pressure of 700 kPa abs

Output and electrical specifications: Output DC 0-10 V (load 10k Ω or above), power supply ± 15 Vdc or 24 Vdc, typical response speed of 35 ms, gas connection material includes sapphire, Inconel alloy, and SUS316L

Summary: Azbil SPG0ZT13RZS000RL capacitive diaphragm vacuum gauge combines the corrosion resistance of sapphire diaphragm with the high precision of electrostatic capacitance principle, and is suitable for vacuum measurement scenarios such as semiconductor, vacuum furnace, coating, and freeze-drying.

Azbil SPG0ZT13RZS000RL 电容隔膜真空计  产品图片

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型号：Azbil SPG0ZT13RZS000RL 电容隔膜真空计

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货