Tofco FLC4000-G10-9-A500-AA-TE1自动流量控制器 PDF资料

1.产 品 资 料 介 绍：

Tofco FLC4000-G10-9-A500-AA-TE1 是日本东富科（TOFCO）FLC4000 系列药液纯水用流量控制器，属于气动驱动式精密流量控制设备，专为半导体制造中的微小流量高精度控制而设计。

产品应用领域（10条）

1. 半导体设备超纯水闭环恒流量控制

2. 高纯化学药液精密输送管理

3. 电子清洗工艺药液流量管控

4. 药液浓度稀释与调液管理

5. 湿法刻蚀/清洗设备流量控制

6. 涂胶显影设备化学试剂供给

7. CMP 研磨液流量控制

8. 需高耐腐蚀性的药液回路

9. 要求快速响应的药液控制场景

10. 无金属析出要求的超纯流体系统

产品参数（3条）

1. 流量范围：G10 规格支持 100～1000 mL/min 等多档可选，接液部为 PTFE/NEW PFA 全氟树脂材质

2. 控制精度：流量精度 ±1.0% F.S.，控制精度 ±2.0% R.D.，重复性 ±0.5%，响应时间 3 秒以内

3. 电源与接口：DC24V 供电，模拟输入可选 4-20mA / 0-5V / 1-5V，气动驱动需 0.4～0.5MPa 洁净干燥气源

结尾

Tofco FLC4000-G10-9-A500-AA-TE1 在半导体药液与纯水供给系统中承担精密流量控制的核心功能，其全氟树脂接液材质与气动快速响应特性适用于对耐腐蚀性和控制精度有较高要求的工艺场景

Tofco FLC4000-G10-9-A500-AA-TE1自动流量控制器  英文介绍

Tofco FLC4000-G10-9-A500-AA-TE1 is a Japanese TOFCO FLC4000 series flow controller for pure water medicine. It belongs to the pneumatic driven precision flow control equipment and is designed for high-precision control of small flow rates in semiconductor manufacturing.

Product application areas (10 items)

Semiconductor equipment ultra pure water closed-loop constant flow control

High purity chemical solution precision transportation management

Electronic cleaning process liquid flow control

Management of dilution and adjustment of drug concentration

Flow control of wet etching/cleaning equipment

Chemical reagent supply for coating and developing equipment

CMP slurry flow control

A highly corrosion-resistant liquid medicine circuit is required

Drug control scenarios that require rapid response

Ultra pure fluid system without metal precipitation requirements

Product parameters (3 items)

Flow range: G10 specification supports multiple options such as 100-1000 mL/min, and the liquid receiving part is made of PTFE/NEW PFA perfluororesin material

Control accuracy: Flow accuracy ± 1. 0% F。S。 Control accuracy ± 2. 0% R。D。 Repeatability ± 0. 5%, response time within 3 seconds

Power supply and interface: DC24V power supply, analog input optional 4-20mA/0-5V/1-5V, pneumatic drive requires 0. 4 to 0. 5MPa clean and dry gas source

ending

Tofco FLC4000-G10-9-A500-AA-TE1 plays a core role in precision flow control in semiconductor liquid and pure water supply systems. Its perfluorinated resin material and pneumatic rapid response characteristics are suitable for process scenarios with high requirements for corrosion resistance and control accuracy

Tofco FLC4000-G10-9-A500-AA-TE1自动流量控制器  产品图片

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4.其他产品

HONEYWELL 51400955-100 Processor Control Board
 TAS.580.0600G00 V01 Vibration module
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型号：Tofco FLC4000-G10-9-A500-AA-TE1自动流量控制器

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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