AMAT 0190-49999伺服电机 PDF资料
AMAT 0190-49999 伺服电机
产品特点(3 条)
应用材料原厂伺服电机组件,核心电机为松下 MMMA3ACN2A2 交流伺服电机,功率 0.03KW。
通常作为线性执行器组件的一部分集成使用,用于半导体设备内部精密运动控制。
属于半导体工艺设备的专用运动组件,接口与安装尺寸针对原厂设备设计。
产品应用领域(10 条)
半导体晶圆处理设备
应用材料工艺设备
真空工艺模块
腔体内部机械机构
晶圆传输系统
精密定位机构
设备维护与备件替换
半导体设备翻新
自动化产线运动控制
半导体设备零部件供应
产品参数(3 条)
产品类型:交流伺服电机 / 线性执行器组件
配套电机:Panasonic MMMA3ACN2A2
额定功率:0.03KW
总结
AMAT 0190-49999 是应用材料半导体设备的原厂伺服电机组件,内置松下 MMMA3ACN2A2 交流伺服电机,用于晶圆处理及腔体内部的精密运动控制。
AMAT 0190-49999 servo motor
Product features (3 items)
The raw material servo motor component is used, and the core motor is Panasonic MMMA3ACN2A2 AC servo motor with a power of 0.03KW.
Usually integrated as part of linear actuator components for precise motion control inside semiconductor devices.
Special motion components belonging to semiconductor process equipment, with interfaces and installation dimensions designed for original equipment.
Product application areas (10 items)
Semiconductor wafer processing equipment
Applied materials, process equipment
Vacuum process module
Internal mechanical mechanism of the cavity
Wafer transfer system
Precision positioning mechanism
Equipment maintenance and spare parts replacement
Semiconductor equipment refurbishment
Automated production line motion control
Supply of semiconductor equipment components
Product parameters (3 items)
Product type: AC servo motor/linear actuator component
Supporting motor: Panasonic MMMA3ACN2A2
Rated power: 0.03KW
Summary
AMAT 0190-49999 is an original factory servo motor component for semiconductor equipment using materials. It is equipped with Panasonic MMMA3ACN2A2 AC servo motor and is used for precision motion control inside wafer processing and chambers.


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