AMAT 0190-48210线性执行器组件 PDF资料
AMAT 0190-48210 线性执行器组件
产品特点(3 条)
应用材料(AMAT)原厂线性执行器组件,用于半导体设备内部的精密直线运动控制。
内置安川 SGMMV-A2E2A-YA15 伺服电机,集成度高,响应快速。
紧凑型设计,适用于空间受限的半导体制造设备运动机构。
产品应用领域(10 条)
半导体晶圆制造设备
应用材料 CVD/PVD 系统
刻蚀设备运动控制
晶圆传输机械手
真空腔体内部传动
精密定位平台
离子注入设备
薄膜沉积设备
半导体检测设备
晶圆搬运系统
产品参数(3 条)
产品类型:线性执行器组件(Linear Actuator Assembly)
内置组件:YASKAWA SGMMV-A2E2A-YA15 伺服电机
电机规格:20W,DC24/48V,额定转矩 0.0637 N·m
总结
AMAT 0190-48210 是应用材料半导体设备的原厂线性执行器组件,内置安川超小型伺服电机,用于晶圆制造与传输环节的精密直线运动控制。
AMAT 0190-48210 Linear actuator component
Product features (3 items)
AMAT original linear actuator components are used for precision linear motion control inside semiconductor equipment.
Built in Yaskawa SGMMV-A2E2A-YA15 servo motor, high integration and fast response.
Compact design, suitable for the motion mechanism of semiconductor manufacturing equipment with limited space.
Product application areas (10 items)
Semiconductor wafer manufacturing equipment
Application Material CVD/PVD System
Etching equipment motion control
Wafer transfer manipulator
Internal transmission of vacuum chamber
Precision positioning platform
Ion implantation equipment
Thin film deposition equipment
Semiconductor testing equipment
Wafer handling system
Product parameters (3 items)
Product type: Linear actuator assembly
Built in components: YASKAWA SGMMV-A2E2A-YA15 servo motor
Motor specification: 20W, DC24/48V, rated torque 0.0637 N · m
Summary
AMAT 0190-48210 is an original linear actuator component for semiconductor equipment, equipped with Yaskawa ultra small servo motors for precision linear motion control in wafer manufacturing and transportation processes.

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