RFPT URG-300 PR000300-001射频发生器 PDF资料
RFPT URG-300(PR000300-001)是 RF Power Products(RFPT)的一款 300W 射频发生器,属于 URG 系列,用于为半导体及工业等离子体工艺提供稳定的射频功率输出。
产品特点
300W 射频功率输出,适合中等功率等离子体工艺
晶控频率,输出稳定,谐波和杂散低
前面板显示与调节,便于现场操作
支持模拟接口远程控制,便于系统集成
工业级可靠性,适应长时间连续运行
产品参数
输出功率:300W
类型:射频发生器
物料状态:市场流通品多为二手/库存件
产品应用领域
半导体刻蚀设备
薄膜沉积系统(CVD/PVD)
等离子体清洗设备
真空镀膜设备
科研等离子体实验装置
工业等离子体处理
射频功率传输系统
老旧射频设备维护替换
光伏与 LED 制造设备
实验室射频电源系统
综上,RFPT URG-300(PR000300-001)是一款 300W 射频发生器,核心作用是为等离子体工艺提供稳定射频功率
RFPT URG-300 PR000300-001射频发生器 英文介绍
RFPT URG-300 (PR000300-001) is a 300W RF generator from RF Power Products (RFPT), belonging to the ORF series, used to provide stable RF power output for semiconductor and industrial plasma processes.
Product Features
300W RF power output, suitable for medium power plasma processes
Crystal controlled frequency, stable output, low harmonic and spurious emissions
Front panel display and adjustment for easy on-site operation
Support remote control through analog interfaces for easy system integration
Industrial grade reliability, suitable for long-term continuous operation
Product Specifications
Output power: 300W
Type: RF Generator
Material status: Most of the circulating goods in the market are second-hand/inventory items
Product application areas
Semiconductor etching equipment
Thin film deposition system (CVD/PVD)
Plasma cleaning equipment
vacuum coating equipment
Research plasma experimental apparatus
Industrial plasma treatment
RF power transmission system
Maintenance and replacement of old RF equipment
Photovoltaic and LED manufacturing equipment
Laboratory RF power supply system
In summary, RFPT URG-300 (PR000300-001) is a 300W RF generator with the core function of providing stable RF power for plasma processes
RFPT URG-300 PR000300-001射频发生器 产品图片

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