Pfeiffer vacuum 3870-07100空气辅助闸阀 PDF资料
Pfeiffer Vacuum 3870-07100 是一款用于真空系统的气动闸阀,通过压缩空气驱动执行机构来实现阀板的开启与关闭。
产品特点
气动驱动,靠压缩空气执行开闭动作
高导通性,阀体内部通径大,气体流阻小
不锈钢阀板,FKM 密封,耐腐蚀且密封性好
带位置指示器,可反馈阀门开关状态
使用寿命长,清洁环境下可达数十万次动作
产品参数
类型:气动闸阀
驱动方式:电-气动,电磁阀控制压缩空气
压缩空气压力:通常约 4–7 bar
产品应用领域
半导体工艺设备真空隔离
薄膜沉积系统(CVD/PVD)
刻蚀设备真空腔体连接
高真空泵与腔体之间的隔离
真空镀膜设备
科研真空系统
分析仪器真空管路
工业真空热处理设备
真空传输腔室(Load Lock)
真空系统维护与备件替换
综上,Pfeiffer Vacuum 3870-07100 是一款气动驱动的高真空闸阀,用于真空系统中隔离腔体与泵组
Pfeiffer vacuum 3870-07100空气辅助闸阀 英文介绍
Pfeiffer Vacuum 3870-07100 is a pneumatic gate valve used in vacuum systems, which opens and closes the valve plate by driving the actuator with compressed air.
Product Features
Pneumatic drive, relying on compressed air to perform opening and closing actions
High conductivity, large internal diameter of valve body, low gas flow resistance
Stainless steel valve plate, FKM seal, corrosion-resistant and with good sealing performance
Equipped with a position indicator, it can provide feedback on the valve switch status
Long service life, capable of hundreds of thousands of actions in clean environments
Product Specifications
Type: Pneumatic gate valve
Drive mode: electric pneumatic, solenoid valve controls compressed air
Compressed air pressure: typically around 4-7 bar
Product application areas
Vacuum isolation of semiconductor process equipment
Thin film deposition system (CVD/PVD)
Vacuum chamber connection of etching equipment
Isolation between high vacuum pump and chamber
vacuum coating equipment
Research vacuum system
Analysis instrument vacuum pipeline
Industrial vacuum heat treatment equipment
Vacuum transfer chamber (load lock)
Vacuum system maintenance and spare parts replacement
In summary, Pfeiffer Vacuum 3870-07100 is a pneumatic driven high vacuum gate valve used for isolating chambers and pump units in vacuum systems
Pfeiffer vacuum 3870-07100空气辅助闸阀 产品图片

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