Brooks GF125C-207009质量流量控制器 PDF资料
Brooks GF125C-207009 是 Brooks GF125 系列中的一款金属密封热式质量流量控制器，核心特点是压力瞬态不敏感（PTI），用于在压力波动工况下保持稳定的气体流量控制。
产品特点
压力瞬态不敏感（PTI），上游压力波动时流量偏差控制在设定值的 5% 以内
MultiFlo 多气体多量程，一台设备可编程支持多种气体和量程组合
响应快，稳定时间 300–700ms，适合短周期工艺
全金属密封流路，Hastelloy 传感器耐腐蚀
内置自诊断，可检测传感器漂移和阀门泄漏
产品参数
满量程范围：3 sccm – 55 slm（N₂ 等效）
精度：>35–100% 量程为设定值 ±1%；2–35% 量程为满量程 ±0.35%
工作温度：10–50°C，最大工作压力 100 psia
产品应用领域
半导体刻蚀设备
薄膜 CVD/MOCVD/PECVD 系统
原子层沉积（ALD）
PVD 系统
外延工艺设备
先进去胶/剥离工艺
离子注入
光伏与 LED 制造
高纯度气体分配系统
科研实验室气体流量控制
综上，GF125C-207009 是面向半导体高纯度气体控制的 PTI 型 MFC，具体气体类型和量程需根据产品标签确认。
Brooks GF125C-207009质量流量控制器 英文介绍
Brooks GF125C-207009 is a metal sealed thermal mass flow controller in the Brooks GF125 series. Its core feature is pressure transient insensitivity (PTI), which is used to maintain stable gas flow control under pressure fluctuation conditions.
Product Features
Pressure transient insensitivity (PTI), with flow deviation controlled within 5% of the set value during upstream pressure fluctuations
MultiFlo multi gas multi range, one device can be programmed to support multiple gas and range combinations
Fast response, stable time of 300-700ms, suitable for short cycle processes
All metal sealed flow path, Hastelloy sensor corrosion-resistant
Built in self diagnosis, capable of detecting sensor drift and valve leakage
Product Specifications
Full range: 3 sccm -55 slm (N ₂ equivalent)
Accuracy:>35-100% range within ± 1% of the set value; 2-35% range is within ± 0.35% of full range
Working temperature: 10-50 ° C, maximum working pressure 100 psi
Product application areas
Semiconductor etching equipment
Thin film CVD/MOCVD/PECVD system
Atomic Layer Deposition (ALD)
PVD system
Epitaxial process equipment
Advanced de gluing/peeling process
ion implantation
Photovoltaic and LED manufacturing
High purity gas distribution system
Gas flow control in research laboratories
Overall, GF125C-207009 is a PTI type MFC designed for semiconductor high-purity gas control. The specific gas type and range need to be confirmed according to the product label.
Brooks GF125C-207009质量流量控制器 产品图片
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| 6001755-02 | 6SC6190-OFB00 | NDS001 |
| 565-5-5-O-B | 6SC9830-0BA02 | NASM02 |
| 565-5-5-O-A-E | 6SC6110-0GA00 | INMMP11 |
| 565-5-5-O-A | 6SC6110-OGB00 | NASI02 |
| 565-5-5-M | 6SC6901-0EA00-Z | NCTM01 |
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