MKS 622B02TBE电子电容压力计 PDF资料

1.产 品 资 料 介 绍：

MKS 622B02TBE 是 MKS 600 系列 Baratron 电容压力计中的一款常温型绝对压力传感器，采用电容薄膜原理，直接测量腔体总压力，与气体种类无关。

产品特点

• 电容薄膜传感，直接测绝对压力，不受气体成分影响

• 常温工作，无需加热，600 系列中较经济的型号

• 响应快，滞后低，分辨率高

• Inconel 镍合金薄膜，耐腐蚀，可耐受卤素、水蒸气、臭氧

• 过压能力强，可承受 45 psia 而不损坏或漂移

产品参数

• 输出信号：0–10 VDC 线性模拟输出

• 供电：±15 VDC，约 35 mA

• 工作温度：0–50°C

产品应用领域

1. 半导体薄膜工艺（刻蚀、灰化、CVD、PVD）

2. 氧化、扩散、离子注入

3. 电子显示器制造

4. 航空航天用先进陶瓷及金属制造

5. 工业与科研自动泄漏测试

6. 生物制药、食品、医疗器械灭菌与冻干

7. 质谱仪、高精度天平、校准标准等分析仪器

8. 激光二极管、磁头、存储盘片制造

9. 真空系统压力监测与控制

10. 研发实验室精密压力测量

综上，MKS 622B02TBE 是一款常温型绝对电容压力计，核心优势是气体无关的直接压力测量和高耐腐蚀性，广泛用于半导体、真空镀膜及科研领域

MKS 622B02TBE电子电容压力计  英文介绍

MKS 622B02TBE is a room temperature absolute pressure sensor in the MKS 600 series Baratron capacitive pressure gauge. It uses the principle of capacitive thin film to directly measure the total pressure of the chamber, regardless of the gas type.

Product Features

Capacitive thin film sensing, directly measuring absolute pressure, not affected by gas composition

Working at room temperature, no heating required, the more economical model in the 600 series

Fast response, low lag, high resolution

Inconel nickel alloy film, corrosion-resistant, can withstand halogens, water vapor, and ozone

Strong overvoltage capability, able to withstand 45 psi without damage or drift

Product Specifications

Output signal: 0-10 VDC linear analog output

Power supply: ± 15 VDC, approximately 35 mA

Working temperature: 0-50 ° C

Product application areas

Semiconductor thin film process (etching, ashing, CVD, PVD)

Oxidation, diffusion, ion implantation

Manufacturing of electronic displays

Advanced Ceramic and Metal Manufacturing for Aerospace Applications

Industrial and scientific research automatic leak testing

Sterilization and freeze-drying of biopharmaceuticals, food, and medical devices

Mass spectrometer, high-precision balance, calibration standards and other analytical instruments

Manufacturing of laser diodes, magnetic heads, and storage disks

Vacuum system pressure monitoring and control

Precision pressure measurement in R&D laboratory

In summary, MKS 622B02TBE is a room temperature absolute capacitance pressure gauge with core advantages of gas independent direct pressure measurement and high corrosion resistance. It is widely used in semiconductor, vacuum coating, and scientific research fields

MKS 622B02TBE电子电容压力计  产品图片

3.其他产品

PPD117A3011 3BHE030410R3011激励控制器
TRICONEX 2000418数字输出模块
TRICONEX 2000417控制模块

4.其他产品

BENTLY 169253-01 Pulse output card
BENTLY 176449-04 Pulse input card
HITACHI LYA100A Logical Sequence Card

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型号：MKS 622B02TBE电子电容压力计

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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