AMAT 0190-47186线性执行器总成 PDF资料

1.产 品 资 料 介 绍：

AMAT 0190-47186 是应用材料（Applied Materials）半导体设备中的一款线性执行器总成，主要集成伺服电机、驱动机构与位置传感器，用于真空及工业环境下的受控线性运动。

产品特点

• 紧凑高精度，集成伺服电机、驱动机构与位置传感器

• 真空兼容，适用于真空腔体及工业环境

• 结构坚固，保证高速重载下的稳定性

• 安装维护方便，便于现场拆装

• 可根据应用需求选择不同规格

产品参数

• 重量：约 1.5–1.8 kg

• 组成：伺服电机、驱动机构、位置传感器集成总成

• 物料状态：市场流通品多为二手/拆机件，部分标注缺失组件

产品应用领域

1. 半导体工艺腔体精密挡板控制

2. 晶圆升降机构

3. 工艺腔体可变间隙调节

4. CVD 设备真空与气路控制

5. 刻蚀设备真空阀门驱动

6. PVD 设备真空与气路控制

7. 真空腔体与 Load Lock 通道控制

8. 工艺气体管路阀门驱动

9. 真空管路阀门驱动

10. 自动化生产线线性定位

综上，AMAT 0190-47186 是一款面向半导体真空工艺设备的精密线性执行器总成，核心功能为在真空环境下实现挡板、晶圆升降及间隙调节等受控线性运动，市场流通件以二手拆机为主，采购时需核实组件完整性与实物状态。

AMAT 0190-47186线性执行器总成  英文介绍

AMAT 0190-47186 is a linear actuator assembly in Applied Materials semiconductor equipment, mainly integrating servo motors, drive mechanisms, and position sensors, used for controlled linear motion in vacuum and industrial environments.

Product Features

Compact and high-precision, integrated servo motor, drive mechanism, and position sensor

Vacuum compatible, suitable for vacuum chambers and industrial environments

Sturdy structure ensures stability under high-speed and heavy loads

Easy installation and maintenance, convenient for on-site disassembly and assembly

Different specifications can be selected according to application requirements

Product Specifications

Weight: Approximately 1.5-1.8 kg

Composition: Integrated assembly of servo motor, drive mechanism, and position sensor

Material status: Most of the circulating products in the market are second-hand/disassembled parts, and some components are marked as missing

Product application areas

Precision baffle control of semiconductor process cavity

Wafer lifting mechanism

Variable gap adjustment of process chamber

Vacuum and gas path control of CVD equipment

Vacuum valve drive for etching equipment

PVD equipment vacuum and gas path control

Vacuum chamber and load lock channel control

Process gas pipeline valve drive

Vacuum pipeline valve drive

Linear positioning of automated production line

In summary, AMAT 0190-47186 is a precision linear actuator assembly designed for semiconductor vacuum process equipment. Its core function is to achieve controlled linear motion such as baffle, wafer lifting, and gap adjustment in a vacuum environment. The market circulation mainly consists of second-hand disassembled parts, and the integrity and physical condition of the components need to be verified during procurement.

AMAT 0190-47186线性执行器总成  产品图片

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com 

型号：AMAT 0190-47186线性执行器总成

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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