Seren 9600540003射频电源模块 PDF资料

1.产 品 资 料 介 绍：

Seren 9600540003 这个具体料号在公开资料中未找到直接对应的产品页面，但结合 Seren 产品命名规则及同系列射频电源的通用特征，可为你整理如下参考信息。

产品特点

• 固态设计，微处理器控制，体积紧凑、重量轻

• 前面板配 4 行真空荧光显示屏，可显示正向/反射功率及状态

• 支持前面板、模拟接口及 RS-232 串行控制

• 具备正向功率、负载功率及外部反馈多种调节模式

• 内置过温、过反射功率及短路/开路保护

产品参数

• 频率：13.56 MHz 晶控，输出功率最高 300 W

• 输入电源：98–125 VAC 或 198–250 VAC，47–63 Hz

• 尺寸：约 5.25 英寸高 × 9.5 英寸宽 × 18.35 英寸深，1/2 机架 3U

产品应用领域

1. 半导体刻蚀、PECVD、PVD 等等离子体工艺

2. 液晶面板与 OLED 生产中的等离子体处理

3. 薄膜太阳能电池沉积

4. 高校及科研等离子体实验装置

5. 磁控溅射、离子镀等真空镀膜

6. 精密零件、晶圆等离子体清洗

7. 射频功率传输系统集成

8. 二手半导体设备维护替换

9. 航空航天精密电子制造

10. 医疗器械等离子体表面处理

综上，Seren 9600540003 应属于 Seren R 系列射频电源模块

Seren 9600540003射频电源模块  英文介绍

The specific part number Seren 9600540003 cannot be found directly on the product page in the public information. However, based on Seren's product naming rules and the common features of RF power supplies in the same series, the following reference information can be compiled for you.

Product Features

Solid state design, microprocessor control, compact size, light weight

The front panel is equipped with 4 rows of vacuum fluorescent display screens, which can display forward/reflected power and status

Support front panel, analog interface, and RS-232 serial control

Equipped with multiple adjustment modes including forward power, load power, and external feedback

Built in over temperature, over reflection power, and short circuit/open circuit protection

Product Specifications

Frequency: 13.56 MHz crystal control, maximum output power of 300 W

Input power supply: 98-125 VAC or 198-250 VAC, 47-63 Hz

Size: Approximately 5.25 inches high x 9.5 inches wide x 18.35 inches deep, 1/2 rack 3U

Product application areas

Plasma processes such as semiconductor etching, PECVD, PVD, etc

Plasma treatment in LCD panel and OLED production

Deposition of Thin Film Solar Cells

University and research plasma experimental equipment

Vacuum coating techniques such as magnetron sputtering and ion plating

Precision parts and wafer plasma cleaning

RF power transmission system integration

Maintenance and replacement of second-hand semiconductor equipment

Aerospace precision electronic manufacturing

Medical Device Plasma Surface Treatment

In summary, Seren 9600540003 should belong to the Seren R series RF power module

Seren 9600540003射频电源模块  产品图片

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195B4516G2连接器模块

4.其他产品

Woodward 5466-1000 Speed module
WOODWARD 5136-RE2-PCI I/O module
A-B 80026-173-23 redundant power supply

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com 

型号：Seren 9600540003射频电源模块

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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