Kyosan Electric HV-PS8 2L80-000558-41高压电源模块 PDF资料
Kyosan Electric HV-PS8 2L80-000558-41 高压电源模块简介
产品特点
属于京三(Kyosan)出品的高压直流电源模块,用于提供晶圆静电吸附所需的高压输出。
常见故障包括上电无反应、高压输出异常、运行数分钟后保护断电、控制端无通讯等。
维修涉及主电容、高压整流模块、驱动板及高压变压器的检测与更换。
属较老型号,市场流通多为拆机件或维修翻新品,原厂供货周期较长。
维修后通常提供数月至半年的功能保固。
产品应用领域
TEL Vigus 系列半导体设备
半导体晶圆静电吸附
CVD / PVD 薄膜沉积设备
离子注入系统
真空系统高压供电
半导体设备维修与备件替换
晶圆厂设备维护保养
二手半导体设备翻新
高压电源模块故障排查
第三方半导体设备维修服务
产品参数
产品型号:HV-PS8;部件号:2L80-000558-41
产品类型:DC 高压电源模块
适用设备:TEL Vigus 等半导体制造设备
总结:Kyosan Electric HV-PS8 2L80-000558-41 是京三制作所生产的高压直流电源模块,主要为 TEL Vigus 等半导体设备的晶圆静电吸附提供高压输出,适用于半导体制造设备的维修与备件替换。
Kyosan Electric HV-PS8 2L80-000558-41高压电源模块 英文介绍
Introduction to Kyosan Electric HV-PS8 2L80-000558-41 High Voltage Power Supply Module
Product Features
Belonging to Kyosan's high-voltage DC power module, it is used to provide the high-voltage output required for wafer electrostatic adsorption.
Common faults include no response when powered on, abnormal high voltage output, protection power-off after running for several minutes, and no communication at the control end.
The maintenance involves the inspection and replacement of the main capacitor, high-voltage rectifier module, drive board, and high-voltage transformer.
It belongs to an older model and is mostly circulated in the market as disassembled parts or repaired new products, with a longer supply cycle from the original factory.
After repair, a functional warranty of several months to six months is usually provided.
Product application areas
TEL Vigus series semiconductor equipment
Semiconductor wafer electrostatic adsorption
CVD/PVD thin film deposition equipment
Ion implantation system
High voltage power supply for vacuum system
Semiconductor equipment maintenance and spare parts replacement
Maintenance and upkeep of wafer fab equipment
Renovation of second-hand semiconductor equipment
Troubleshooting of High Voltage Power Supply Module
Third party semiconductor equipment maintenance services
Product Specifications
Product model: HV-PS8; Part number: 2L80-0000558-41
Product Type: DC High Voltage Power Supply Module
Applicable equipment: TEL Vigus and other semiconductor manufacturing equipment
Summary: Kyosan Electric HV-PS8 2L80-0000558-41 is a high-voltage DC power module produced by Jingsan Manufacturing Co., Ltd. It mainly provides high-voltage output for wafer electrostatic adsorption of semiconductor equipment such as TEL Vigus, and is suitable for maintenance and spare parts replacement of semiconductor manufacturing equipment.
Kyosan Electric HV-PS8 2L80-000558-41高压电源模块 产品图片

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