Oxford plasma  PC91S21083控制板   PDF资料

1.产 品 资 料 介 绍：

Oxford Plasma PC91S21083 控制板简介

产品特点

1. 属于 Oxford Plasmalab System 100 系列 ICP-RIE 设备的主控制 PCB 板，完整型号为 94-PC91S21083 REV 3。

2. 在系统控制架构中承担电源分配与信号中转功能，为屏幕及各类外设提供 +24V、+15V、-15V 等多路直流电压。

3. 板卡故障会直接影响系统启动，导致泵无法正常开启、CM 规读数丢失或加热器失控等连锁问题。

4. 作为 Oxford Plasmalab System 100 控制机架内的核心板卡，配合 X20 PLC 及 PC 端软件协同工作。

5. 该板卡目前已属较老型号，原厂供货周期极长，市场上流通的多为拆机翻新件。

产品应用领域

1. Oxford Plasmalab System 100 ICP-RIE 设备维修

2. 半导体刻蚀设备控制系统维护

3. 等离子体刻蚀机故障排查

4. 控制机架板卡更换与备件储备

5. 二手 Oxford 设备翻新

6. 实验室刻蚀设备售后备件供应

7. 电源分配与信号中转模块替换

8. 设备因水泄漏导致板卡损坏后的恢复

9. 泵体启动故障相关电路维修

10. 加热器控制异常相关板卡检修

产品参数

1. 产品型号：94-PC91S21083 REV 3（常简写为 PC91S21083）

2. 产品类型：主控制 PCB 板卡 / 电源与信号分配板

3. 适用设备：Oxford Plasmalab System 100 ICP-RIE

总结：Oxford Plasma PC91S21083 是 Plasmalab System 100 系列 ICP-RIE 设备的主控制 PCB 板，负责多路直流电压分配与信号中转，其故障会引发泵启动失败、规管读数丢失及加热失控等连锁问题，适用于该系列刻蚀设备的维修与备件更换。

Oxford plasma  PC91S21083控制板  英文介绍

Introduction to Oxford Plasma PC91PDO83 Control Board

Product Features

The main control PCB board belongs to the Oxford Plasmalab System 100 series ICP-RIE equipment, with the complete model number 94-PC91PDO83 REV 3.

Undertake power distribution and signal relay functions in the system control architecture, providing multiple DC voltages such as+24V,+15V, and -15V for screens and various peripherals.

Card failures can directly affect system startup, resulting in pump failure to start normally, loss of CM gauge readings, or heater loss of control and other chain problems.

As the core board in the Oxford Plasmalab System 100 control rack, it works in conjunction with X20 PLC and PC software.

The board is currently an older model with a very long original supply cycle, and most of the parts circulating in the market are refurbished parts.

Product application areas

Oxford Plasmalab System 100 ICP-RIE Equipment Maintenance

Maintenance of semiconductor etching equipment control system

Troubleshooting of plasma etching machine

Control rack card replacement and spare parts reserve

Renovation of second-hand Oxford equipment

After sales spare parts supply for laboratory etching equipment

Replacement of power distribution and signal relay module

Recovery of equipment after board damage caused by water leakage

Repair of circuit related to pump body startup failure

Maintenance of boards related to abnormal heater control

Product Specifications

Product model: 94-PC91PDO83 REV 3 (often abbreviated as PC91PDO83)

Product Type: Main Control PCB Board/Power and Signal Distribution Board

Applicable equipment: Oxford Plasmalab System 100 ICP-RIE

Summary: Oxford Plasma PC91PDO83 is the main control PCB board for the Plasma System 100 series ICP-RIE equipment, responsible for multi-channel DC voltage distribution and signal relay. Its failure can cause pump start-up failure, loss of regulatory readings, and heating runaway, among other chain problems. It is suitable for maintenance and spare parts replacement of this series of etching equipment.

Oxford plasma  PC91S21083控制板  产品图片

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型号：Oxford plasma  PC91S21083控制板

质保：一年

成色：全新/二手

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