LAM 810-073479-005通讯模块 PDF资料

1.产 品 资 料 介 绍：

LAM 810-073479-005 是泛林（Lam Research）半导体刻蚀设备中的 Jetstream 气箱主板，负责气路流量与压力采集、电磁阀驱动控制。

产品特点：

1. 泛林 Jetstream 刻蚀设备气体盒主控 PCB，属核心备件

2. 多路混合 DI/AI 采集通道，同步采集 MFC 流量与腔体压力信号

3. 全通道光电隔离设计，抵御射频干扰与静电冲击

4. 多层强弱电分区布线，多点接地，抑制信号串扰

5. 负责工艺气体电磁阀驱动与开关时序管理

6. 支持气路压力监测、超限报警与安全切断

7. 板载状态指示灯与硬件自检，快速定位气路通道故障

8. 镀金连接器与金手指，耐洁净车间微量腐蚀性气体

9. 内置多路稳压电路，为气阀和传感器提供稳定供电

10. 工业级元器件，支持 7×24 小时产线运行，宽温度耐受

产品应用领域：

1. 泛林 Jetstream 系列刻蚀机气体供给箱主控

2. 多路 MFC 质量流量控制器信号采集与闭环控制

3. 工艺气体电磁阀驱动与开关时序管理

4. 气箱单元与机台主控之间工艺数据交互传输

5. 半导体设备维修与备件替换

结尾：
LAM 810-073479-005 是泛林刻蚀设备 Jetstream 气箱的核心主控板卡，负责气体流量、压力采集及电磁阀驱动控制。

LAM 810-073479-005通讯模块  英文介绍

LAM 810-073479-005 is the Jetstream gas box motherboard in Lam Research's semiconductor etching equipment, responsible for gas path flow and pressure acquisition, as well as solenoid valve drive control.

Product Features:

Pan Lin Jetstream etching equipment gas box main control PCB, which is a core spare part

Multi channel mixed DI/AI acquisition channel, synchronously collecting MFC flow and chamber pressure signals

Full channel optoelectronic isolation design to resist RF interference and electrostatic shock

Multi layer strong and weak electrical partition wiring, multi-point grounding, suppressing signal crosstalk

Responsible for the timing management of process gas solenoid valve drive and switch

Support gas pressure monitoring, over limit alarm, and safety shutdown

Onboard status indicator light and hardware self-test, quickly locate air channel faults

Gold plated connectors and gold fingers, resistant to trace corrosive gases in clean workshops

Built in multi-channel voltage stabilization circuit provides stable power supply for air valves and sensors

Industrial grade components, supporting 7 × 24-hour production line operation, wide temperature tolerance

Product application areas:

Pan Lin Jetstream series etching machine gas supply box main control

Signal acquisition and closed-loop control of multi-channel MFC mass flow controller

Process gas solenoid valve drive and switch timing management

Process data exchange and transmission between the gas box unit and the machine master control

Semiconductor equipment maintenance and spare parts replacement

ending:

LAM 810-073479-005 is the core control board of the Jetstream gas box in the Panlin etching equipment, responsible for gas flow, pressure acquisition, and solenoid valve drive control.

LAM 810-073479-005通讯模块 产品图片

3.其他产品

LTC391AE01 HIEE401782R0001控制器模块
LDMUI-01A 61320946C输入输出模块
PPC905AE101 3BHE014070R0101控制器模块

4.其他产品

HIMA F7115 Channel isolation module
HONEYWELL 10105/2/1 Pulse input module
ICS TRIPLEX T8800 Redundant channel module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com 

型号：LAM 810-073479-005通讯模块

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货