MKS AS00680G-11集成式压力控制器 PDF资料
MKS AS00680G-11 集成式压力控制器
产品特点
压力测量、比例控制阀和闭环控制电路集成在一个紧凑的机身里，省空间、省成本。
内置 Baratron 电容薄膜压力计，测量精度高、稳定性好。
控制响应快，到达设定值的时间短，超调小。
可配置上游或下游控制模式，适应不同管路布局。
支持 DeviceNet、EtherCAT 等数字通讯，方便接入自动化系统。
应用领域
半导体制造中的背面晶圆冷却压力控制。
传输腔的压力控制。
工艺气体管路的压力平衡。
真空镀膜设备的压力调节。
刻蚀和沉积工艺中的腔体压力控制。
平板显示器生产线。
需要高洁净度、金属密封的真空工艺。
老旧真空系统的压力控制升级替换。
研发实验室的精密压力控制。
其他需要快速、准确压力调节的真空场景。
总结
MKS AS00680G-11 集测量、控制、通讯于一体，精度高、响应快，主要用在半导体、镀膜等对压力控制要求高的真空工艺中。
MKS AS00680G-11 Integrated Pressure Controller
Product Features
The pressure measurement, proportional control valve, and closed-loop control circuit are integrated into a compact body, saving space and cost.
Built in Baratron capacitive film pressure gauge, with high measurement accuracy and good stability.
Fast control response, short time to reach the set value, and minimal overshoot.
Can configure upstream or downstream control modes to adapt to different pipeline layouts.
Supports digital communication such as DeviceNet and EtherCAT for easy access to automation systems.
Application Areas
Control of backside wafer cooling pressure in semiconductor manufacturing.
Pressure control of transmission chamber.
Pressure balance of process gas pipelines.
Pressure regulation of vacuum coating equipment.
Control of cavity pressure in etching and deposition processes.
Flat panel display production line.
High cleanliness and metal sealed vacuum technology are required.
Upgrade and replace the pressure control of the old vacuum system.
Precision pressure control in the research and development laboratory.
Other vacuum scenarios that require fast and accurate pressure regulation.
Summary
MKS AS00680G-11 integrates measurement, control, and communication, with high accuracy and fast response. It is mainly used in vacuum processes such as semiconductors and coatings that require high pressure control.
3.其他产品
Bently 3500/64M 176449-05 压力监测模块
ProSoft 5205-DFNT-PDPS 以太网网关
PM864AK02冗余处理器单元
4.其他产品
AI635 3BHT300032R1 Channel isolation module
CI627 3BSE008799R1 Comm Interface Refurb
DI651 3BHT300026R1 Digital Input 32Ch
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| PMB31D-00100-02 | IMASM03 | 61031 Terminal Block, Relay |
| PMB31D-00100-01 | NKMP11 | PFVL141R |
| PMB31D-00100-00 | AMAT 0100-13011 | PFEA111 |
| PMB31B-20216-03 | 70 FA 01b | 3ASD573001A13 YPK112A |
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