Rexroth R985005744电机齿轮组件 PDF资料
Rexroth R985005744 电机齿轮组件
产品概述
Rexroth R985005744 是博世力士乐（Bosch Rexroth）生产的压盘电机齿轮组件，齿轮头型号为 VRS-140C-10-K3-38LA38，对应 AMAT 部件号 0195-16056，通常以翻新状态供应。
应用领域（6条）
半导体制造设备：用于 AMAT 相关设备的压盘驱动系统
晶圆研磨/抛光设备：驱动压盘完成研磨或抛光动作
CMP 化学机械平坦化设备：控制研磨头的旋转运动
精密运动控制：需要高精度齿轮减速的传动场景
工业自动化：作为伺服电机配套的齿轮减速单元
旧设备维护：替换故障的压盘电机齿轮组件
产品特点（4条）
精密齿轮减速：VRS 系列齿轮头，传动精度高
原厂配套：对应 AMAT 0195-16056 部件号
翻新品状态：市场流通多为翻新件
紧凑集成：电机与齿轮头一体化设计
总结
Rexroth R985005744 电机齿轮组件是博世力士乐 VRS 系列产品，主要用于半导体 CMP 及研磨设备的压盘驱动，具备精密减速、原厂适配和紧凑集成等特点，是保障设备传动精度与稳定性的关键部件。
Rexroth R985005744电机齿轮组件 英文介绍
Rexroth R985005744 motor gear assembly
Product Overview
Rexroth R985005744 is a pressure plate motor gear assembly produced by Bosch Rexroth. The gear head model is VRS-140C-10-K3-38LA38, corresponding to AMAT part number 0195-16056, and is usually supplied in refurbished condition.
Application areas (6 items)
Semiconductor manufacturing equipment: pressure plate drive system for AMAT related equipment
Wafer grinding/polishing equipment: drives the pressure plate to complete the grinding or polishing action
CMP chemical mechanical planarization equipment: controlling the rotational motion of the grinding head
Precision motion control: transmission scenarios that require high-precision gear reduction
Industrial automation: gear reduction unit as a matching servo motor
Old equipment maintenance: replace faulty pressure plate motor gear components
Product features (4 items)
Precision gear reduction: VRS series gear head, high transmission accuracy
Original factory matching: corresponding to AMAT 0195-16056 part number
Refurbished product status: The market circulation is mostly refurbished parts
Compact integration: motor and gear head integrated design
Summary
The Rexroth R985005744 motor gear assembly is a Bosch Rexroth VRS series product, mainly used for pressure plate drive in semiconductor CMP and grinding equipment. It has the characteristics of precision reduction, factory adaptation, and compact integration, and is a key component to ensure the accuracy and stability of equipment transmission.
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| PMB33C-00116-03 | NTMF01 | P21SRXB-LSS-NS-02 |
| PMB33C-00116-02 | AMAT 0100-71278 | 57160001-FX DSTD 132 |
| PMB33C-00116-01 | AMAT 0020-03509C | 57120001-FG DSAO 130 |
| PMB33C-00116-00 | AMAT 129-0202 | N31HRFG-LSS-M2-02 |
| PMB33C-00114-03 | 07KR240 | P21NSXC-LSS-NS-05 |
| PMB33C-00114-02 | 70 EA 03a-E | M22NSXA-LDN-NS-02 |
| PMB33C-00114-01 | NKTL01 | P21NRXB-LNS-NS-05 |
| PMB33C-00114-00 | INICT03 | N31HRHK-LNK-NS-00 |
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