Seiko Seiki  SCU-P027PRT3涡轮分子控制器 PDF资料

1.产 品 资 料 介 绍：

Seiko Seiki SCU-P027PRT3 涡轮分子控制器

产品概述

Seiko Seiki SCU-P027PRT3 是精工精机（Seiko Seiki）生产的 STP 系列涡轮分子泵控制器，也常以 BOC Edwards / Seiko Seiki 品牌出售，用于驱动和控制涡轮分子泵的运行。

应用领域（6条）

1. 半导体制造设备：驱动工艺腔体的高真空分子泵

2. 真空镀膜设备：配套溅射、蒸发等镀膜系统的抽气单元

3. 科研仪器：电子显微镜、表面分析设备的高真空系统

4. 旧设备维护：替换故障的 STP 系列控制器

5. 二手半导体设备翻新：作为维修备件使用

6. 通用高真空系统：需要涡轮分子泵驱动的工业或科研场景

产品特点（4条）

1. STP 系列专用：配套 Seiko Seiki STP 涡轮分子泵使用

2. 电源规格：208V，50/60 Hz

3. 监测与保护：内置传感器监测运行状态，具备错误检测功能

4. 二手可用：市场流通多为测试正常的二手件，可正常运行

总结

Seiko Seiki SCU-P027PRT3 是 STP 系列涡轮分子泵的专用控制器，主要用于半导体制造和真空设备的

Seiko Seiki  SCU-P027PRT3涡轮分子控制器   英文介绍

Seiko SCU-P027PRT3 Turbine Molecular Controller

Product Overview

Seiko Seiko SCU-P027PRT3 is an STP series turbo molecular pump controller produced by Seiko Seiki, also commonly sold under the BOC Edwards/Seiko brand, used to drive and control the operation of turbo molecular pumps.

Application areas (6 items)

Semiconductor manufacturing equipment: high vacuum molecular pump for driving process chambers

Vacuum coating equipment: equipped with exhaust units for sputtering, evaporation and other coating systems

Research instruments: high vacuum systems for electron microscopes and surface analysis equipment

Old equipment maintenance: replace faulty STP series controllers

Second hand semiconductor equipment refurbishment: used as maintenance spare parts

Universal high vacuum system: industrial or scientific research scenarios that require turbomolecular pump drive

Product features (4 items)

STP series dedicated: used in conjunction with Seiko Seiko STP turbo molecular pump

Power specification: 208V, 50/60 Hz

Monitoring and protection: Built in sensors monitor the operating status and have error detection function

Second hand available: The market circulation is mostly second-hand parts that have been tested and are functioning normally

Summary

Seiko Seiko SCU-P027PRT3 is a dedicated controller for STP series turbo molecular pumps, mainly used in semiconductor manufacturing and vacuum equipment

Seiko Seiki  SCU-P027PRT3涡轮分子控制器 产品图片

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型号：Seiko Seiki  SCU-P027PRT3涡轮分子控制器

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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