AMAT 0190-51023射频匹配器 PDF资料
AMAT 0190-51023 射频匹配器
产品概述
AMAT 0190-51023 是应用材料（Applied Materials）生产的射频匹配器，用于半导体等离子体工艺设备中射频电源与腔体之间的阻抗匹配。
应用领域（10条）
刻蚀设备
PECVD 等离子体增强化学气相沉积设备
CVD 化学气相沉积设备
PVD 物理气相沉积设备
离子注入设备
等离子清洗设备
去胶设备
磁控溅射设备
半导体镀膜设备
其他等离子体处理设备
产品特点（4条）
自动阻抗匹配，减少反射功率
反射超标自动保护
模块化设计，便于维护
适配半导体洁净环境
总结
AMAT 0190-51023 射频匹配器是应用材料等离子体设备的核心射频部件，主要用于刻蚀、沉积等半导体工艺，保障射频功率稳定传输。
AMAT 0190-51023 RF Matcher
Product Overview
AMAT 0190-51023 is an RF matching device produced by Applied Materials, used for impedance matching between RF power supply and cavity in semiconductor plasma process equipment.
Application areas (10 items)
Etching equipment
PECVD plasma enhanced chemical vapor deposition equipment
CVD chemical vapor deposition equipment
PVD Physical Vapor Deposition Equipment
Ion implantation equipment
Plasma cleaning equipment
Glue removal equipment
Magnetron sputtering equipment
Semiconductor coating equipment
Other plasma processing equipment
Product features (4 items)
Automatic impedance matching to reduce reflected power
Automatic protection against excessive reflection
Modular design for easy maintenance
Adapt to clean semiconductor environments
Summary
AMAT 0190-51023 RF Matcher is the core RF component of applied material plasma equipment, mainly used for semiconductor processes such as etching and deposition to ensure stable RF power transmission.
AMAT 0190-51023射频匹配器 产品图片
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SR750-P5-G1-S1-HI-A20-R Relay protector
| PMB33C-10114-01 | 70 SK 36b-E | P22NSHA-LNF-NS-03 |
| PMB33C-10114-00 | IIMKM01A | M21NSHS-LNN-NS-02 |
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| PMB33C-10101-02 | NKTU111 | N33HCHK-LNS-NS-02 |
| PMB33C-10101-01 | AMAT 0100-35083 | 57160001-NF DSDO 115 |
| PMB33C-10101-00 | AMAT 0100-00024 | P22NSXB-LNN-NS-05 |
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