Inficon 924-601-G1气体分析仪 PDF资料

1.产 品 资 料 介 绍：

Inficon 924-601-G1 气体分析仪

产品概述

Inficon 924-601-G1 是 Inficon 生产的 Transpector HPR 系列残余气体分析仪，配套 H100M 传感器使用，用于半导体真空工艺的气体监测，美国制造。

应用领域（6条）

1. 半导体溅射工艺：监测腔体残余气体和污染物

2. 氦气检漏：用于设备密封性检测和泄漏定位

3. 工艺腔体健康监测：监控背景气体成分，预防性维护

4. 刻蚀与沉积工艺：检测污染物和副产物

5. 真空系统诊断：分析残余气体成分和分压

6. 设备集成监控：配合 FabGuard 系统实现自动化监控

产品特点（5条）

1. 高灵敏度：最低可检测 5×10⁻¹⁵ Torr 的微量污染物

2. 自动校准：内置参考气体，支持自动化诊断

3. 宽动态范围：九个数量级，兼顾高低浓度

4. 通信灵活：支持 RS232/RS485 接口

5. 系统集成：兼容 FabGuard 自动化监控系统

总结

Inficon 924-601-G1 气体分析仪是 Inficon 的高性能残余气体分析产品，广泛应用于半导体溅射、刻蚀、检漏及真空诊断等领域，具备高灵敏度、自动校准和系统集成等特点，能有效保障真空工艺的污染控制与设备健康监测。

Inficon 924-601-G1气体分析仪   英文介绍

Inficon 924-601-G1 gas analyzer

Product Overview

Inficon 924-601-G1 is a residual gas analyzer from the Transpector HPR series produced by Inficon, used in conjunction with the H100M sensor for gas monitoring in semiconductor vacuum processes. It is manufactured in the United States.

Application areas (6 items)

Semiconductor sputtering process: monitoring residual gases and pollutants in the chamber

Helium leak detection: used for equipment sealing testing and leak location

Process chamber health monitoring: monitoring background gas composition, preventive maintenance

Etching and deposition processes: detecting pollutants and by-products

Vacuum system diagnosis: analysis of residual gas composition and partial pressure

Equipment integration monitoring: Automated monitoring achieved in conjunction with FabGuard system

Product features (5 items)

High sensitivity: capable of detecting trace pollutants up to a minimum of 5 × 10 ⁻¹⁵ Torr

Automatic calibration: Built in reference gas, supports automated diagnosis

Wide dynamic range: nine orders of magnitude, balancing high and low concentrations

Flexible communication: Supports RS232/RS485 interfaces

System integration: compatible with FabGuard automated monitoring system

Summary

The Inficon 924-601-G1 gas analyzer is Inficon's high-performance residual gas analysis product, widely used in fields such as semiconductor sputtering, etching, leak detection, and vacuum diagnosis. It features high sensitivity, automatic calibration, and system integration, effectively ensuring pollution control and equipment health monitoring in vacuum processes.

Inficon 924-601-G1气体分析仪 产品图片

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型号：Inficon 924-601-G1气体分析仪

质保：一年

成色：全新/二手

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