ENI MWH-5-01自动匹配控制器 PDF资料
ENI MWH-5-01 自动匹配控制器
产品概述
ENI MWH-5-01 是 ENI（现属 MKS Instruments）生产的射频自动匹配网络控制器，属于 MWH-5 系列，工作频率为 13.56 MHz，用于射频电源与负载之间的阻抗匹配。
应用领域（6条）
半导体制造设备：用于刻蚀、PVD、CVD 等工艺的射频功率匹配
真空镀膜设备：匹配射频电源与溅射靶材
等离子体处理系统：自动调节阻抗，维持等离子体稳定
工业射频加热设备：用于射频功率传输的阻抗匹配
科研实验设备：射频等离子体相关研究
其他需要射频阻抗自动匹配的工业系统
产品特点（5条）
自动阻抗匹配：内置自动调谐功能，实时匹配负载变化
13.56 MHz 标准频率：适配半导体行业常用射频电源
宽工作温度范围：-40°C 至 70°C，适应多种工业环境
内置保护功能：具备过压、过流保护，减少系统停机
工业级设计：坚固耐用，适合半导体制造等要求严苛的场景
总结
ENI MWH-5-01 自动匹配控制器是 ENI/MKS 的 13.56 MHz 射频阻抗匹配产品，广泛应用于半导体刻蚀、沉积及等离子体处理等领域，具备自动匹配、工业级可靠性和内置保护等特点，能有效保障射频功率传输的稳定性与效率。
ENI MWH-5-01 Automatic Matching Controller
Product Overview
ENI MWH-5-01 is an RF automatic matching network controller produced by ENI (now MKS Instruments), belonging to the MWH-5 series, with a working frequency of 13.56 MHz, used for impedance matching between RF power supply and load.
Application areas (6 items)
Semiconductor manufacturing equipment: RF power matching for processes such as etching, PVD, CVD, etc
Vacuum coating equipment: matching RF power supply with sputtering target material
Plasma processing system: automatically adjusts impedance to maintain plasma stability
Industrial RF heating equipment: impedance matching for RF power transmission
Research experimental equipment: RF plasma related research
Other industrial systems that require automatic matching of RF impedance
Product features (5 items)
Automatic impedance matching: Built in automatic tuning function, real-time matching of load changes
13.56 MHz standard frequency: suitable for commonly used RF power supplies in the semiconductor industry
Wide working temperature range: -40 ° C to 70 ° C, suitable for various industrial environments
Built in protection function: equipped with overvoltage and overcurrent protection, reducing system shutdown
Industrial grade design: sturdy and durable, suitable for demanding scenarios such as semiconductor manufacturing
Summary
The ENI MWH-5-01 automatic matching controller is a 13.56 MHz RF impedance matching product of ENI/MKS, widely used in fields such as semiconductor etching, deposition, and plasma treatment. It has the characteristics of automatic matching, industrial grade reliability, and built-in protection, which can effectively ensure the stability and efficiency of RF power transmission.
ENI MWH-5-01自动匹配控制器 产品图片
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| PMB33C-10114-01 | 70 SK 36b-E | P22NSHA-LNF-NS-03 |
| PMB33C-10114-00 | IIMKM01A | M21NSHS-LNN-NS-02 |
| PMB33C-10101-03 | 07MK62 | N33HRFL-LNK-NS-00 |
| PMB33C-10101-02 | NKTU111 | N33HCHK-LNS-NS-02 |
| PMB33C-10101-01 | AMAT 0100-35083 | 57160001-NF DSDO 115 |
| PMB33C-10101-00 | AMAT 0100-00024 | P22NSXB-LNN-NS-05 |
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