VAT 65048-JH52-AGD1闸阀电机 PDF资料

1.产 品 资 料 介 绍：

VAT 65048-JH52-AGD1 闸阀电机

产品概述

VAT 65048-JH52-AGD1 是瑞士 VAT 公司生产的闸阀驱动电机，属于 Series 650 系列，专用于半导体真空摆阀的驱动控制。

应用领域（6条）

1. 半导体刻蚀设备：调节刻蚀腔室真空压力

2. 薄膜沉积设备：控制腔室真空度

3. 真空摆阀驱动：控制阀板开度，调节真空流量

4. 压力控制场景：用于真空腔室的下游压力控制

5. 旧机台维护：半导体设备阀门驱动部件的替换

6. 真空工艺设备：各类需要精密真空控制的半导体设备

产品特点（5条）

1. 步进驱动结构：精确控制阀板开度定位

2. 内置位置编码器：实时反馈阀门实际开度

3. 24V DC 供电：兼容半导体领域标准电压

4. 自适应力矩调节：防止阀板卡滞和过载损坏

5. 洁净室级密封：适用于无尘真空工艺环境

总结

VAT 65048-JH52-AGD1 闸阀电机是 VAT Series 650 系列真空摆阀的专用驱动部件，广泛应用于刻蚀、沉积等半导体工艺设备的真空压力控制，具备精确步进驱动、实时位置反馈和洁净设计等特点，能有效保障真空系统的稳定运行。

VAT 65048-JH52-AGD1闸阀电机   英文介绍

VAT 65048-JH52-AGD1 gate valve motor

Product Overview

VAT 65048-JH52-AGD1 is a gate valve drive motor produced by Swiss VAT company, belonging to the Series 650 series, specifically designed for driving and controlling semiconductor vacuum swing valves.

Application areas (6 items)

Semiconductor etching equipment: adjusting the vacuum pressure of the etching chamber

Thin film deposition equipment: control chamber vacuum degree

Vacuum swing valve drive: controls valve plate opening and adjusts vacuum flow rate

Pressure control scenario: downstream pressure control for vacuum chambers

Old machine maintenance: replacement of valve drive components for semiconductor equipment

Vacuum process equipment: various semiconductor devices that require precise vacuum control

Product features (5 items)

Step drive structure: precise control of valve plate opening positioning

Built in position encoder: real-time feedback of actual valve opening

24V DC power supply: compatible with standard voltages in the semiconductor field

Adaptive torque regulation: prevent valve card lag and overload damage

Cleanroom level sealing: suitable for dust-free vacuum process environments

Summary

The VAT 65048-JH52-AGD1 gate valve motor is a specialized driving component for the VAT Series 650 vacuum swing valve, widely used in vacuum pressure control of semiconductor process equipment such as etching and deposition. It has the characteristics of precise step drive, real-time position feedback, and clean design, which can effectively ensure the stable operation of the vacuum system.

VAT 65048-JH52-AGD1闸阀电机 产品图片

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com 

型号：VAT 65048-JH52-AGD1闸阀电机

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货