Hitachi CR-712VC晶圆搬运清洁机器人  PDF资料

1.产 品 资 料 介 绍：

Hitachi CR-712VC 晶圆搬运清洁机器人

产品概述

Hitachi CR-712VC 是日立（Hitachi）生产的晶圆搬运清洁机器人，用于半导体制造过程中的晶圆传输，产地为日本。

应用领域（6条）

1. 半导体制造设备：用于晶圆在腔室之间的传输

2. EFEM 设备前端模块：配合晶圆盒完成取放

3. 刻蚀设备：从刻蚀系统中搬运晶圆

4. CVD/PVD 设备：用于沉积工艺的晶圆传输

5. 检测设备：配合检测系统完成晶圆传送

6. 真空传输腔室：用于真空环境下的晶圆搬运

产品特点（5条）

1. 洁净设计：适用于无尘室环境，减少颗粒污染

2. 晶圆搬运专用：专为半导体晶圆传输设计

3. 原厂制造：日立原装产品，品质稳定

4. 适配性强：可配套多种半导体设备使用

5. 日本制造：可靠性高，使用寿命长

总结

Hitachi CR-712VC 晶圆搬运清洁机器人是日立半导体设备的核心传输部件，广泛应用于刻蚀、沉积及检测等工艺设备的晶圆搬运，具备洁净设计、原厂适配和稳定可靠等特点，能有效保障晶圆传输的洁净度与效率。

Hitachi CR-712VC晶圆搬运清洁机器人   英文介绍

Hitachi CR-712VC Wafer Handling and Cleaning Robot

Product Overview

The Hitachi CR-712VC is a wafer handling and cleaning robot produced by Hitachi, used for wafer transfer in semiconductor manufacturing processes. It is manufactured in Japan.

Application areas (6 items)

Semiconductor manufacturing equipment: used for transferring wafers between chambers

EFEM device front-end module: cooperates with the wafer box to complete the retrieval and placement

Etching equipment: transporting wafers from the etching system

CVD/PVD equipment: wafer transfer for deposition processes

Testing equipment: cooperate with the testing system to complete wafer transfer

Vacuum transfer chamber: used for wafer handling in a vacuum environment

Product features (5 items)

Clean design: suitable for cleanroom environments, reducing particle pollution

Dedicated for wafer handling: designed specifically for semiconductor wafer transfer

Original manufacturing: Hitachi original products with stable quality

Strong adaptability: can be used with various semiconductor devices

Made in Japan: High reliability and long service life

Summary

The Hitachi CR-712VC wafer handling and cleaning robot is the core transmission component of Hitachi semiconductor equipment, widely used in wafer handling of etching, deposition, and detection process equipment. It has the characteristics of clean design, factory adaptation, and stable reliability, which can effectively ensure the cleanliness and efficiency of wafer handling.

Hitachi CR-712VC晶圆搬运清洁机器人  产品图片

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com 

型号：Hitachi CR-712VC晶圆搬运清洁机器人

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货